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Fabrication and characterization of rugate structures composed of SiO2 and Nb2O5

         

摘要

Gradient index layers and rugate structures were fabricated on a Leybold Syrus pro deposition system by plasma-assisted coevaporation of the low index material silica and the high index material niobium pentoxide. To obtain information about the compositional profiles of the produced layers, cross sectional transmission electron microscopy was used in assistance to deposition rate data recorded by two independent crystal monitors during the film preparation. The depth dependent concentration profiles were transformed to refractive index gradients by means of effective medium approximation. Based on the refractive index gradients the corresponding samples` transmission and reflection spectra could be calculated by utilizing matrix formalism. The relevance of the established refractive index profiles could be verified by comparison of the calculated spectra with the measured ones.

著录项

  • 来源
    《光学精密工程》 |2005年第4期|505-511|共7页
  • 作者单位

    Institut für Angewandte Physik,Friedrich Schiller University Jena,Max-Wien-Platz 1,07743 Jena,Germany;

    Optical Coatings Department,Fraunhofer Institut für Angewandte Optik und Feinmechanik,Albert-Einstein-Str.7,D-07745 Jena,Germany;

    Institut für Angewandte Physik,Friedrich Schiller University Jena,Max-Wien-Platz 1,07743 Jena,Germany;

    Optical Coatings Department,Fraunhofer Institut für Angewandte Optik und Feinmechanik,Albert-Einstein-Str.7,D-07745 Jena,Germany;

    Institute Ruder Boskovic,Bijenicka 54,10000 Zagreb,Croatia;

    Optical Coatings Department,Fraunhofer Institut für Angewandte Optik und Feinmechanik,Albert-Einstein-Str.7,D-07745 Jena,Germany;

  • 原文格式 PDF
  • 正文语种 chi
  • 中图分类 光学;
  • 关键词

    physical vapor deposition; effective medium approximation; rugate structure;

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