MEMS thermal micro-flow sensors own the advantages of high sensitivity, wide measurement range, and short response time, which provide important practical values for Biochemistry and Medicine. First, we introduced the operating principles and fundamental structures of MEMS. Secondly, the classification, developing history and technical characteristics were elaborated. The developing tends and application prospects were also discussed in the end.%MEMS热式微流量传感器具有灵敏度高、量程宽、响应时间短等优点，在生化医疗等领域具有重要的实用价值和意义。本综述首先介绍了MEMS热式流量传感器的工作原理和基本结构，随后阐述了此类传感器的分类、发展历史与技术特性，最后展望了其今后的发展趋势和应用前景。
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