聚合物材料在真空紫外环境下出气逸出可造成分子污染。对聚酰亚胺薄膜进行真空紫外辐照试验，利用污染凝结效应试验设备测试辐照前后薄膜的质量损失，并通过SEM及XPS观察分析辐照前后薄膜的表面形貌、表面化学结构与成分变化。结果表明：真空紫外辐照可引起聚酰亚胺质量损失增加，且随辐照时间增加，质量损失逐渐趋于饱和；辐照后，样品表面形貌未发生明显变化；材料表面的C–O含量增加，且随辐照时间增加继续略微增长；C=O含量降低，且随辐照时间增加而继续降低。%Outgassing of polymer materials induced by vacuum ultraviolet (VUV) may cause molecular contamination. In this paper, the polyimide (PI) film is radiated with the VUV irradiation by using the VUV experimental facility, and the mass loss for the PI sample is determined by utilizing the outgassing contamination condensation effect facility. The topographical analysis and the chemical structure are studied by the SEM and the XPS, respectively. Results show that the mass loss for the polyimide induced by VUV irradiations improves and saturates with the increase of the irradiation time. The surface topography of the PI sample doesn’t change significantly. The XPS analysis indicates that the content of the C–O enhances, whereas that of the C=O is reduced.
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