采用磁控溅射法制备了ZnS／CdS复合窗口层，并将其应用于 CdTe 太阳能电池。对所制备薄膜的形貌和结构等进行了研究。测试了具有不同窗口层的CdTe太阳电池的量子效率和光Ⅰ-Ⅴ特性，分析了ZnS薄膜制备条件对CdTe电池器件性能影响；研究了CdS薄膜厚度和ZnS／CdS 复合窗口层对短波区透过率以及CdTe太阳电池的光谱响应的影响。着重研究了具有ZnS／CdS复合窗口层的CdTe太阳电池的短波光谱响应。结果表明，CdS窗口层厚度从100 nm减至50 nm后，其对短波区光子透过率平均提高了18．3％，CdTe太阳电池短波区光谱响应平均提高了27．6％。衬底温度250℃条件下制备的ZnS晶粒尺寸小于室温下制备的ZnS。具有ZnS／CdS复合窗口层的CdTe电池中，采用衬底温度250℃沉积ZnS薄膜来制备窗口层的电池器件，其性能要优于室温下沉积ZnS制备窗口层的电池器件。这说明晶粒尺寸的大小对电子输运有一定影响。在相同厚度CdS的前提下，具有ZnS／CdS复合窗口层的CdTe电池比具有CdS窗口层在短波的光谱响应提高了约2％。这说明ZnS／CdS复合窗口层能够做到减少对短波光子的吸收，从而使更多的光子被CdTe电池的吸收层吸收。%ZnS/CdS composite window layer was prepared by magnetron sputtering method and then applied to CdTe solar cell. The morphology and structure of films were measured.The data of Ⅰ-Ⅴ in light and the quantum efficiency of CdTe solar cells with different window layers were also measured.The effect of ZnS films prepared in different conditions on the performance of CdTe solar cells was researched.The effects of both CdS thickness and ZnS/CdS composite layer on the transmission in short wavelength were studied.Particularly,the quantum efficiency of CdTe solar cells with ZnS/CdS window layer was measured. The results show as follows.With the thickness of CdS window layer reducing from 100 to 50 nm,the transmission increase 18. 3% averagely in short wavelength and the quantum efficiency of CdTe solar cells increase 27. 6% averagely.The grain size of ZnS prepared in 250 ℃ is smaller than prepared at room temperature.The performance of CdTe solar cells with ZnS/CdS win-dow layer is much better if ZnS deposited at 250 ℃.This indicates grain size has some effect on the electron transportation. When the CdS holds the same thickness,the transmission of ZnS/CdS window layer was improved about 2%in short wavelength compared with CdS window layer.The quantum efficiency of CdTe solar cells with ZnS/CdS window layer was also improved a-bout 2% in short wavelength compared with that based on CdS window layer.These indicate ZnS/CdS composite window layer can increase the photon transmission in short wavelength so that more photons can be absorbed by the absorbent layer of CdTe solar cells.
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