针对仿昆虫扑翼飞行器核心动力装置——微驱动器的结构特点和研究难点,设计了一种基于静电驱动原理的毫米(mm)级微扑翼驱动器,并针对各个部件研究了整套加工工艺与测试方法.运动优化与升力测试结果表明:微扑翼驱动器(翼展9 mm,重量3 mg)以91 Hz的频率实现了±40°的拍动和±25°的扭转运动,输出1.5 mg的升力,升重较以往静电微扑翼驱动器有大幅提升.研究成果为实现仿昆虫微型飞行器的自主飞行提供了新的方向,并奠定了理论与试验基础.%Insect-inspired flapping-wing micro air vehicles(FMAV)are small in size and with high maneuver. Aiming at problems of structure characteristic and research difficulties of micro actuator,core power device of FMAV,a millimeter-scale electrostatic micro flapping-wing actuator based on electrostatic-actuated principle is designed.Moreover,a series of fabrication and testing methods are also developed.The result of testing shows that the 9mm in wing span and 3mg in weight stroke frequency of actuator is 91 Hz,flapping angle is ±40°,rotating angle is ±25°and lift force is 1.5mg.Lift-to-weight ratio is highly increased compared to previous results.These achievements lead to a new way to realize liftoff of FMAV and lay the foundation for theory and experiment.
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