In order to broaden the temperature measurement range of MEMS thermopile sensor,and achieve high temperature measurement, according to the principle of MEMS thermopile sensor, static and dynamic calibration devices of MEMS thermopile sensor based on A2TPMI334 model are designed and established, and calibration results are gained. At the same time, the technical project and realizable means which achieve transient high-temperature measure based on MEMS thermopile sensor are provided, and its essential part-infrared weaken piece performance is analyzed and discussed.%为了拓宽MEMS热电堆传感器的温度测量范围,实现高温测量,根据MEMS热电堆传感器的原理,设计完成了A2TPMI334型MEMS热电堆传感器静态与动态标定装置,通过试验得到标定结果;同时,提供了基于MEMS热电堆传感器实现瞬态高温测试的技术方案和实现手段,并对其关键部分--红外衰减片性能进行了分析和讨论.
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