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MEMS Based Thermopile Infrared Detector Array for Chemical and Biological Sensing

机译：基于mEms的热电堆红外探测器阵列，用于化学和生物传感

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Black Forest Engineering's (BFE's) objective of the Phase I effort was to develop thermopile infrared detector linear arrays meeting the requirements of chemical and biological sensing such as Foster-Miller's Infrared Bio-Aerosol Threat Alert (IBATA) system. BFE's thermopile fabrication objective is to use materials and processes compatible with standard silicon based integrated circuit foundries in order to reduce cost. The fabrication of silicon-based thermopiles, differentially coupled with advanced BFE CMOS readout integrated circuitry (ROIC), will provide DOD with rugged, inexpensive, and high performance infrared sensing capabilities. The Phase I design objective was to implement a 64-channel linear array with 0.5 mm pitch and > 90% fill factor. The MEMs based LWIR (8-12 Jm) thermopile array will provide detectivity (D*) > 1 x 108 Jones, time constant.

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