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Friction Durability of Extremely Thin Diamond-Like Carbon Films at High Temperature

机译：极薄的类金刚石碳膜在高温下的摩擦耐久性

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摘要

To clarify the friction durability, both during and after the high-temperature heating of nanometer-thick diamond-like carbon (DLC) films, deposited using filtered cathodic vacuum arc (FCVA) and plasma chemical vapor deposition (P-CVD) methods, the dependence of the friction coefficient on the load and sliding cycles of the DLC films, were evaluated. Cluster-I consisted of a low friction area in which the DLC film was effective, while cluster-II consisted of a high friction area in which the lubricating effect of the DLC film was lost. The friction durability of the films was evaluated by statistical cluster analysis. Extremely thin FCVA-DLC films exhibited an excellent wear resistance at room temperature, but their friction durability was decreased at high temperatures. In contrast, the durability of the P-CVD-DLC films was increased at high temperatures when compared with that observed at room temperature. This inverse dependence on temperature corresponded to the nano-friction results obtained by atomic force microscopy. The decrease in the friction durability of the FCVA-DLC films at high temperatures, was caused by a complex effect of temperature and friction. The tribochemical reaction produced by the P-CVD-DLC films reduced their friction coefficient, increasing their durability at high temperatures.
机译：为了阐明在使用过滤阴极真空电弧（FCVA）和等离子化学气相沉积（P-CVD）沉积的纳米厚类金刚石碳（DLC）膜的高温加热期间和之后的摩擦耐久性，评估了摩擦系数对DLC薄膜的载荷和滑动循环的依赖性。簇I由其中DLC膜有效的低摩擦区域组成，而簇II由其中DLC膜的润滑作用丧失的高摩擦区域组成。通过统计聚类分析评价膜的摩擦耐久性。极薄的FCVA-DLC薄膜在室温下具有出色的耐磨性，但在高温下其摩擦耐久性却下降。相反，与在室温下观察到的相比，在高温下P-CVD-DLC膜的耐久性增加。对温度的这种反依赖性对应于通过原子力显微镜获得的纳米摩擦结果。 FCVA-DLC薄膜在高温下的摩擦耐久性下降是由于温度和摩擦的复杂作用引起的。 P-CVD-DLC薄膜产生的摩擦化学反应降低了它们的摩擦系数，从而提高了其在高温下的耐久性。

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