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Repetition Rate Effects in Picosecond Laser Microprocessing of Aluminum and Steel in Water

机译：皮秒级激光微处理水中铝和钢的重复率效应

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摘要

Picosecond laser drilling was studied in the case of industrial steel and aluminum, which are difficult to microprocess by conventional methods. The dependence of hole morphology and dimensions on the pulse repetition rate and number of pulses in water and air were ascertained. For both materials, the diameter of the hole is larger in water than in air. In water, the diameter is larger at higher repetition rates than at lower ones, and increases with the number of pulses. In air, the hole diameter is not affected by the repetition rate, and remains constant from 100 to 100,000 pulses. Overall, material removal is more efficient in water than in air. The shape of the hole is generally more irregular in water, becoming more so as the number of pulses is increased. This is probably due to debris being trapped in the hole, since water flowing over the target surface cannot efficiently remove it. In aluminum, the depth of the hole is smaller at higher repetition rates. By scanning the beam over the aluminum target in water, the laser penetrates a 400-μm thick workpiece, generating a line with comparable widths at the entrance and exit surfaces.
机译：在工业钢和铝的情况下，对皮秒激光钻孔进行了研究，这很难通过常规方法进行微加工。确定了孔的形态和尺寸对脉冲重复率和水和空气中脉冲数的依赖性。对于这两种材料，孔的直径在水中比在空气中大。在水中，重复频率越高，直径越大，重复频率越低，并且随着脉冲数的增加而增大。在空气中，孔径不受重复率的影响，并且在100到100,000个脉冲之间保持恒定。总体而言，在水中去除材料比在空气中去除材料更有效。孔的形状在水中通常更不规则，随着脉冲数的增加而变得更大。这可能是由于碎屑被困在孔中，因为在目标表面上流动的水无法有效地将其清除。在铝中，孔的深度在重复率较高时较小。通过在水中的铝靶上扫描光束，激光可以穿透厚度为400μm的工件，从而在入射和出射表面产生一条宽度相当的线。

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