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Fabrications of L-Band LiNbO3-Based SAW Resonators for Aerospace Applications

机译：基于L波段LiNbO3的SAW谐振器的制造

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High frequency surface acoustic wave (SAW) technology offers many opportunities for aerospace applications in passive wireless sensing and communication. This paper presents the design, simulation, fabrication, and test of an L-band SAW resonator based on 128° Y-X LiNbO3 substrate. The design parameters of SAW resonator were optimized by the finite element (FEM) method and the coupling-of-mode (COM) theory. Electron-beam lithography (EBL) technology was used to fabricate the submicron-scale of interdigital transducers (IDTs) and grating reflectors. The effects of some key EBL processes (e.g., the use of electron beam resist, the choice of metal deposition methods, the charge-accumulation effect, and the proximity-effect) on the fabrication precision of SAW devices were discussed. Experimentally, the LiNbO3-based SAW resonators fabricated using improved EBL technology exhibits a Rayleigh wave resonance peaks at 1.55 GHz with return loss about −12 dB, and quality factor Q is 517. Based on this SAW resonator, the temperature and strain sensing tests were performed, respectively. The experimental results exhibit a well linear dependence of temperature/strain on frequency-shift, with a temperature sensitivity of 125.4 kHz/°C and a strain sensitivity of −831 Hz/με, respectively.
机译：高频表面声波（SAW）技术为无源无线传感和通信中的航空航天应用提供了许多机会。本文介绍了基于128°Y-X LiNbO3衬底的L波段声表面波谐振器的设计，仿真，制造和测试。利用有限元（FEM）方法和模式耦合（COM）理论对声表面波谐振器的设计参数进行了优化。电子束光刻（EBL）技术用于制造叉指式换能器（IDT）和光栅反射器的亚微米级。讨论了一些关键的EBL工艺（例如，电子束抗蚀剂的使用，金属沉积方法的选择，电荷积累效应和邻近效应）对SAW器件制造精度的影响。实验上，使用改进的EBL技术制造的基于LiNbO3的SAW谐振器在1.55 GHz处出现瑞利波谐振峰，回波损耗约为-12 dB，品质因数Q为517。基于该SAW谐振器，进行了温度和应变感应测试分别执行。实验结果显示温度/应变对频移具有良好的线性依赖性，温度灵敏度分别为125.4 kHz /°C和应变灵敏度为-831 Hz /με。

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