• 主题
高级搜索  >
历史搜索 清空历史
首页> 美国卫生研究院文献>Micromachines >A MEMS-Based Quad-Wavelength Hybrid Plasmonic–Pyroelectric Infrared Detector
【2h】

A MEMS-Based Quad-Wavelength Hybrid Plasmonic–Pyroelectric Infrared Detector

机译：基于MEMS的四波长混合等离子-热释电红外探测器

代理获取
本网站仅为用户提供外文OA文献查询和代理获取服务，本网站没有原文。下单后我们将采用程序或人工为您竭诚获取高质量的原文，但由于OA文献来源多样且变更频繁，仍可能出现获取不到、文献不完整或与标题不符等情况，如果获取不到我们将提供退款服务。请知悉。
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Spectrally selective detection is of crucial importance for diverse modern spectroscopic applications such as multi-wavelength pyrometry, non-dispersive infrared gas sensing, biomedical analysis, flame detection, and thermal imaging. This paper reports a quad-wavelength hybrid plasmonic–pyroelectric detector that exhibited spectrally selective infrared detection at four wavelengths—3.3, 3.7, 4.1, and 4.5 μm. The narrowband detection was achieved by coupling the incident infrared light to the resonant modes of the four different plasmonic perfect absorbers based on Al-disk-array placed on a Al2O3–Al bilayer. These absorbers were directly integrated on top of a zinc oxide thin film functioning as a pyroelectric transducer. The device was fabricated using micro-electromechanical system (MEMS) technology to optimize the spectral responsivity. The proposed detector operated at room temperature and exhibited a responsivity of approximately 100–140 mV/W with a full width at half maximum of about 0.9–1.2 μm. The wavelength tunability, high spectral resolution, compactness and robust MEMS-based platform of the hybrid device demonstrated a great advantage over conventional photodetectors with bandpass filters, and exhibited impressive possibilities for miniature multi-wavelength spectroscopic devices.
机译：光谱选择性检测对于多种现代光谱应用（例如多波长高温测定，非分散红外气体传感，生物医学分析，火焰检测和热成像）至关重要。本文报道了一种四波长混合等离子-热释电探测器，在四个波长（3.3、3.7、4.1和4.5μm）上表现出光谱选择性红外探测。窄带检测是通过将入射的红外光耦合到基于置于Al2O3-Al双层上的Al-disk-array的四种不同的等离激元完美吸收体的共振模式来实现的。这些吸收剂直接集成在用作热电换能器的氧化锌薄膜上。该设备是使用微机电系统（MEMS）技术制造的，以优化光谱响应度。拟议中的探测器在室温下工作，并显示出大约100-140 mV / W的响应度，半峰全宽约为0.9-1.2μm。混合设备的波长可调性，高光谱分辨率，紧凑性和基于MEMS的强大平台显示了优于具有带通滤光片的传统光电探测器的巨大优势，并为微型多波长光谱仪展示了令人印象深刻的可能性。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
代理获取

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号