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Development of a novel thin film pyroelectric infrared detector.

机译：新型薄膜热释电红外探测器的研制。

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摘要

Passively-cooled, thin film pyroelectric infrared detectors have been developed for unique space-borne applications. Initial research involved selecting the best material for the active, sensing layer in a detector structure to be used aboard an Earth-orbiting satellite. The first critical attribute of this material is an operating, or Curie, temperature near 90 K, as this is the satellite's ambient temperature and thus the operating temperature of an onboard, passively-cooled detector. Second, the material's capacitance, or dielectric constant, must display a large nonlinear temperature dependence in the temperature region surrounding its Curie point.; The studied materials were selected from a small group of ferroelectric alloy systems that could obtain a Curie temperature of 90 K. Initial research focused on potassium tantalate niobate (KTa1−xNbxO 3 or KTN). Thin KTN films were grown by pulsed laser deposition onto strontium titanate single crystal substrates, utilizing a pulsed laser deposited strontium ruthenate metallic oxide as a buffer layer. However substandard dielectric properties due to non-stoichiometric growth and the presence of a paraelectric crystalline phase led us to the best alternative alloy system which did not include any highly volatile elements: barium strontium titanate (Ba1−xSrxTiO3 or BST). Pulsed laser deposited thin BST films grew stoichiometrically and phase pure. Further, initial dielectric property measurements showed significant promise toward the eventual creation of a highly sensitive pyroelectric detector utilizing BST epilayers. Thin film thermal sensitivity was optimized through PLD parameter studies. We observed a dramatic increase in thin film sensitivity when growth was slowed to produce a film with high in-plane tensile stress and large grain size.; In addition to materials optimization, detector prototypes were pursued. Detector development demanded integration with silicon-based read-out electronics. Thus depositions of BST on Si/SiN substrates were performed and device prototypes were fabricated. The electrode configuration was examined and a detector structure utilizing a single metallic oxide electrode was found to generate the highest quality detector. These first prototypes measured a detectivity figure of merit comparable to those of pyroelectric detectors commonly used in room temperature applications. More significantly, these unique detectors were designed to operate optimally in a temperature regime near 90 Kelvin.
机译：被动冷却的薄膜热释电红外探测器已经开发用于独特的太空应用。最初的研究涉及为在地球轨道卫星上使用的探测器结构中的有源传感层选择最佳材料。这种材料的第一个关键属性是接近90 K的工作温度或居里温度，因为这是卫星的环境温度，因此是机载被动冷却探测器的工作温度。其次，材料的电容或介电常数必须在居里点周围的温度区域内表现出很大的非线性温度依赖性。研究材料选自一小组铁电合金系统，其居里温度可以达到90K。初步研究的重点是钽酸钽铌酸钾（KTa 1-x Nb x O 3 或KTN）。利用脉冲激光沉积的钌酸锶金属氧化物作为缓冲层，通过脉冲激光沉积在钛酸锶单晶基板上生长KTN薄膜。但是，由于非化学计量增长和顺电结晶相的存在，介电性能不合格，导致我们选择了不包含任何高挥发性元素的最佳替代合金体系：钛酸钡锶（Ba 1-x Sr x TiO 3 或BST）。脉冲激光沉积的薄BST薄膜化学计量生长且相纯。此外，最初的介电性能测量结果表明，最终有望利用BST外延层创建高灵敏度的热电探测器。通过PLD参数研究优化了薄膜热敏性。我们观察到，当生长减慢以产生具有高面内拉伸应力和大晶粒尺寸的薄膜时，薄膜灵敏度会急剧增加。除了材料优化外，还追求探测器原型。探测器的开发要求与基于硅的读出电子设备集成。因此，进行了BST在Si / SiN衬底上的沉积，并制造了器件原型。检查了电极配置，发现使用单个金属氧化物电极的检测器结构可产生最高质量的检测器。这些第一个原型测得的检测品质因数可与室温应用中常用的热释电检测器相媲美。更重要的是，这些独特的检测器设计为在接近90开氏温度的温度范围内最佳运行。

著录项

  • 作者

    Schloss, Lawrence Frederick.;

  • 作者单位

    University of California, Berkeley.;

  • 授予单位 University of California, Berkeley.;
  • 学科 Engineering Materials Science.
  • 学位 Ph.D.
  • 年度 2001
  • 页码 139 p.
  • 总页数 139
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 工程材料学;
  • 关键词

  • 入库时间 2022-08-17 11:47:21

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