Abstract: An IR sensor with the lead-titanate (PbTiO$-3$/) thin-film and thermal isolation improvement structure using the technology of micro-opto-mechanical system has been designed, fabricated and developed. In this paper, both numerical analysis of the static operation mechanisms such as the effects of IR light power on the depletion layer width and voltage drop across the thin PbTiO$-3$/ film, and the dynamic responses of a thin-film pyroelectric sensor to sinusoidal modulated radiation are reported and compared to the experimental results. The fitting is quite well. The major IR-sensing par ton the cantilever beam of the developed sensor consists of a 50-nm PbTiO$-3$/ layer deposited by RF sputtering, and a gold layer evaporated as an IR radiation absorber. With active cantilever dimensions of 200 $MUL 100 $MUL 5 $mu@m$+3$/ formed by etching processes, the cantilever structure exhibits a much superior performances to that of a traditional IR-sensing bulk structure under the 800-$mu@W incident optical light with wavelength of 970 nm. !10
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机译：摘要：设计，制造和开发了一种具有钛酸铅（PbTiO $ -3 $ /）薄膜和热隔离改善结构的红外传感器。本文对静态操作机理进行了数值分析，例如红外光功率对PbTiO $ -3 $ /薄膜上耗尽层宽度和电压降的影响，以及薄膜热释电传感器的动态响应。报告了正弦调制辐射的辐射，并将其与实验结果进行了比较。拟合得很好。所开发传感器的悬臂梁主要用于红外传感，包括通过RF溅射沉积的50 nm PbTiO $ -3 $ /层和作为IR辐射吸收剂蒸发的金层。通过蚀刻工艺形成的有源悬臂尺寸为200 $ MUL 100 $ MUL 5 $ mu @ m $ + 3 $ /，在800-μmu下，悬臂结构的性能要优于传统的红外传感体结构波长为970 nm的@W入射光。 ！10
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