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Method of Measuring the Mismatch of Parasitic Capacitance in MEMS Accelerometer Based on Regulating Electrostatic Stiffness

机译：基于静电刚度调节的MEMS加速度计寄生电容失配方法

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摘要

For the MEMS capacitive accelerometer, parasitic capacitance is a serious problem. Its mismatch will deteriorate the performance of accelerometer. Obtaining the mismatch of the parasitic capacitance precisely is helpful for improving the performance of bias and scale. Currently, the method of measuring the mismatch is limited in the direct measuring using the instrument. This traditional method has low accuracy for it would lead in extra parasitic capacitive and have other problems. This paper presents a novel method based on the mechanism of a closed-loop accelerometer. The strongly linear relationship between the output of electric force and the square of pre-load voltage is obtained through theoretical derivation and validated by experiment. Based on this relationship, the mismatch of parasitic capacitance can be obtained precisely through regulating electrostatic stiffness without other equipment. The results can be applied in the design of decreasing the mismatch and electrical adjusting for eliminating the influence of the mismatch.
机译：对于MEMS电容式加速度计，寄生电容是一个严重的问题。它的不匹配会降低加速度计的性能。精确地获得寄生电容的失配有助于改善偏置和比例性能。当前，在使用仪器直接测量中，测量失配的方法受到限制。这种传统方法的准确性较低，因为它会导致额外的寄生电容，并存在其他问题。本文提出了一种基于闭环加速度计原理的新方法。通过理论推导得到了电力输出与预载电压平方之间的强线性关系，并通过实验进行了验证。基于这种关系，无需其他设备即可通过调节静电刚度来精确获得寄生电容的失配。该结果可用于减少失配和电气调整以消除失配影响的设计中。

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