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首页> 外文期刊>Journal of Microelectromechanical Systems >A MEMS Resonant Accelerometer With High Relative Sensitivity Based on Sensing Scheme of Electrostatically Induced Stiffness Perturbation
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A MEMS Resonant Accelerometer With High Relative Sensitivity Based on Sensing Scheme of Electrostatically Induced Stiffness Perturbation

机译：具有高相对灵敏度的MEMS共振加速度计，基于静电诱导刚度扰动的感测方案

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摘要

This paper reports a micro electromechanical system (MEMS) resonant accelerometer with high relative sensitivity based on sensing scheme of electrostatically-induced stiffness perturbation for the first time. The perturbation electrodes convert the acceleration induced displacement of proof masses to electrostatic perturbation force and cause the effective stiffness perturbation and frequency shift of the resonator. The design of structure dimensions and the application of electrostaticallyinduced stiffness perturbation lower the resonant frequency and improve the sensitivity, resulting in the improvement of relative sensitivity. The sensing scheme is theoretically analyzed and the device is systematically simulated by finite element analysis (FEA). The open-loop characterization demonstrates that the differential sensitivity is 297.5 Hz/g at resonant frequency of 16.061 kHz under polarization voltage of 50 V. The relative sensitivity, defined as the absolute sensitivity divided by resonant frequency, of 1.8523 %/g is much higher than the traditional resonant accelerometers based on axial force sensing. The bias instability is 0.11 mg and noise floor is 13.2 mg/root Hz. The performance makes the device a potentially attractive option for highly-sensitive acceleration measurements.
机译：本文报告了一种微机电系统（MEMS）共振加速度计，其具有高相对灵敏度的基于第一次静电静脉扰动的传感方案。扰动电极将静电扰动力的加速度诱导诱导的位移转换为静电扰动力，并导致谐振器的有效刚度扰动和频移。结构尺寸的设计和静电突出扰动的应用降低了谐振频率，提高了灵敏度，导致相对灵敏度的提高。理论上分析了感测方案，通过有限元分析（FEA）系统地模拟了该装置。开环表征表明，在50V的偏振电压下谐振频率为16.061kHz的谐振频率为297.5Hz / g.相对灵敏度，定义为绝对灵敏度除以谐振频率，为1.8523％/ g要高得多比基于轴向力传感的传统共振加速度计。偏置不稳定性为0.11毫克，噪音底板为13.2毫克/根目的。该性能使设备成为高度敏感的加速度测量的潜在有吸引力的选择。

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