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Electrical and Optical Properties of a Transparent Conductive ITO/Ga2O3/Ag/Ga2O3 Multilayer for Ultraviolet Light-Emitting Diodes

机译：紫外发光二极管用透明导电ITO / Ga2O3 / Ag / Ga2O3多层膜的电学和光学性质

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We fabricated an indium tin oxide (ITO)/Ga2O3/Ag/Ga2O3 multilayer as a transparent conductive electrode for ultraviolet light-emitting diodes (UV LEDs). The electrical and optical properties of the multilayer were improved by optimizing the annealing temperature of the ITO contact layer and the whole ITO/Ga2O3/Ag/Ga2O3 multilayer, and the thickness of the ITO contact layer and Ag metal layer. After optimization, the sheet resistance and transmittance of the ITO/Ga2O3/Ag/Ga2O3 multilayer was 3.43 Ω/sq and 86.4% at 335 nm, respectively. The ITO/Ga2O3/Ag/Ga2O3 multilayer also exhibited a good ohmic contact characteristic with a specific contact resistance of 1.45×10⁻³ Ω·cm². These results show that the proposed ITO/Ga₂O₃/Ag/Ga₂O₃ multilayer is a promising alternative as a p-type electrode for UV LEDs.

机译：我们制造了氧化铟锡（ITO）/ Ga2O3 / Ag / Ga2O3多层膜作为用于紫外线发光二极管（UV LED）的透明导电电极。通过优化ITO接触层和整个ITO / Ga2O3 / Ag / Ga2O3多层的退火温度，以及ITO接触层和Ag金属层的厚度，可以改善多层的电学和光学性能。经过优化后，ITO / Ga2O3 / Ag / Ga2O3多层膜的薄层电阻和透射率在335 nm处分别为3.43Ω/ sq和86.4％。 ITO / Ga2O3 / Ag / Ga2O3多层膜还表现出良好的欧姆接触特性，比电阻为1.45×10 ^{-3 Ω·cm ^{2 。这些结果表明，建议的ITO / Ga _{2 O _{3 / Ag / Ga _{2 O _{3 多层结构是有希望作为紫外线LED的p型电极的替代品。}}}}}}

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期刊名称 Nanomaterials
作者
Siwei Liang; Quanbin Zhou; Xianhui Li; Ming Zhong; Hong Wang;
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作者单位

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年(卷),期 2019(9),3
年度 2019
页码 403
总页数 11
原文格式 PDF
正文语种
中图分类生化遗传学;生化药理学;
关键词
Ga2O3 transparent conductive electrode UV LEDs transmittance sheet resistance;

机译：Ga2O3;透明导电电极;UV LED;透射率;薄层电阻;

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专利

1. Effect of Hydrogen Post-Annealing on Transparent Conductive ITO/Ga2O3 Bi-Layer Films for Deep Ultraviolet Light-Emitting Diodes [J] . Kim Kyeong Heon, Kim Su Jin, Park Sang Young, Journal of nanoscience and nanotechnology . 2015,第10期

机译：氢后退火对深紫外发光二极管透明导电ITO / Ga2O3双层薄膜的影响
2. The effect of the multi-period on the properties of deep-ultraviolet transparent conductive Ga2O3/ITO alternating multilayer films* [J] . Xu Chengyang, Yan Jinliang, Li Chao, Journal of Semiconductors . 2013,第10期

机译：多周期对深紫外透明导电Ga2O3 / ITO交替多层膜性能的影响*
3. Improved Electrical and Optical Properties of ITO/Ag/ITO Films by Using Electron Beam Irradiation and Their Application to Ultraviolet Light-Emitting Diode as Highly Transparent p-Type Electrodes [J] . C. H. Hong, Y. J. Jo, H. A. Kim, Journal of nanoscience and nanotechnology . 2012,第5期

机译：电子束辐照改善ITO / Ag / ITO薄膜的电学和光学性能并将其作为高度透明的p型电极应用于紫外发光二极管
4. OPTICAL AND ELECTRICAL PROPERTIES OF TiO_2 BASED TRANSPARENT CONDUCTIVE FILMS AND MULTILAYER SYSTEMS FABRICATED BY RADIO FREQUENCY SPUTTERING AND E-BEAM EVAPORATION [C] . M. L. Grilli, A. Sytchkova, M. R. Mancini, Italian National Conference on Photonic Technologies . 2017

机译：基于TiO_2的透明导电膜的光学和电性能和通过射频溅射制造的多层系统和电子束蒸发
5. Improvement of III-nitride visible and ultraviolet light-emitting diode performance, including extraction efficiency, electrical efficiency, thermal management and efficiency maintenance at high current densities. [D] . Vampola, Kenneth. 2009

机译：改进了III族氮化物可见光和紫外发光二极管的性能，包括提取效率，电效率，热管理和高电流密度下的效率维持。
6. Epitaxial growth and magnetic properties of ultraviolet transparent Ga2O3/(Ga1−xFex)2O3 multilayer thin films [O] . Daoyou Guo, Yuehua An, Wei Cui, -1

机译：紫外透明Ga2O3 /（Ga1-xFex）2O3多层薄膜的外延生长和磁性
7. Structural optical and electrical properties of transparent conductive ITO/Al-Ag/ITO multilayer contact [O] . Aliyu Kabiru Isiyaku, Ahmad Hadi Ali, Nafarizal Nayan 2019

机译：透明导电ITO / AL-AG / ITO多层接触的结构光学和电气性能

Electrical and Optical Properties of a Transparent Conductive ITO/Ga2O3/Ag/Ga2O3 Multilayer for Ultraviolet Light-Emitting Diodes

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