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Soft x-ray reflectometry hard x-ray photoelectron spectroscopy and transmission electron microscopy investigations of the internal structure of TiO2(Ti)/SiO2/Si stacks

机译：TiO2（Ti）/ SiO2 / Si叠层内部结构的软X射线反射法硬X射线光电子能谱和透射电子显微镜研究

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摘要

We developed a mathematical analysis method of reflectometry data and used it to characterize the internal structure of TiO2/SiO2/Si and Ti/SiO2/Si stacks. Atomic concentration profiles of all the chemical elements composing the samples were reconstructed from the analysis of the reflectivity curves measured versus the incidence angle at different soft x-ray reflection (SXR) photon energies. The results were confirmed by the conventional techniques of hard x-ray photoelectron spectroscopy (HXPES) and high-resolution transmission electron microscopy (HRTEM). The depth variation of the chemical composition, thicknesses and densities of individual layers extracted from SXR and HXPES measurements are in close agreement and correlate well with the HRTEM images.

机译：我们开发了一种反射测量数据的数学分析方法，并将其用于表征TiO2 / SiO2 / Si和Ti / SiO2 / Si叠层的内部结构。通过分析在不同的软X射线反射（SXR）光子能量下测得的反射率曲线与入射角的关系，可以重构出组成样品的所有化学元素的原子浓度分布。结果通过硬X射线光电子能谱（HXPES）和高分辨率透射电子显微镜（HRTEM）的常规技术得到了证实。从SXR和HXPES测量中提取的各个层的化学成分，厚度和密度的深度变化非常一致，并且与HRTEM图像很好地相关。

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期刊名称 Science and Technology of Advanced Materials
作者
Elena O Filatova; Igor V Kozhevnikov; Andrey A Sokolov; Evgeniy V Ubyivovk; Sergey Yulin; Mihaela Gorgoi; Franz Schäfers;
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作者单位

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年(卷),期 2012(13),1
年度 2012
页码 015001
总页数 12
原文格式 PDF
正文语种
中图分类
关键词
Titanium dioxide Metallic titanium Thin films Interface Soft x-ray reflectometry (SXR) HXPES HRTEM;

机译：二氧化钛;金属钛;薄膜;界面;软X射线反射仪（SXR）;HXPES;HRTEM;

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专利

1. Soft x-ray reflectometry, hard x-ray photoelectron spectroscopy and transmission electron microscopy investigations of the internal structure of TiO2(Ti)/SiO2/Si stacks [J] . Science and technology of advanced materials . 2012,第1期

机译：TiO2（Ti）/ SiO2 / Si叠层内部结构的软X射线反射法，硬X射线光电子能谱和透射电子显微镜研究
2. Investigation of nanoparticulate silicon as printed layers using scanning electron microscopy, transmission electron microscopy, X-ray absorption spectroscopy and X-ray photoelectron spectroscopy [J] . Unuigbe David M., Harting Margit, Jonah Emmanuel O., Journal of synchrotron radiation . 2017,第5期

机译：用扫描电子显微镜，透射电子显微镜，X射线吸收光谱和X射线光电子能谱研究纳米颗粒硅作为印刷层。
3. Investigation of nanoparticulate silicon as printed layers using scanning electron microscopy, transmission electron microscopy, X-ray absorption spectroscopy and X-ray photoelectron spectroscopy [J] . David M. Unuigbe, Margit Harting, Emmanuel O. Jonah, Journal of synchrotron radiation . 2017,第5期

机译：用扫描电子显微镜，透射电子显微镜，X射线吸收光谱和X射线光电子能谱研究纳米颗粒硅作为印刷层。
4. Reaction Mechanism Analysis of a Li-O_2 Battery: Structure of Electrode/Electrolyte Interface Probed Via Soft X-Ray Absorption Spectroscopy, Hard X-Ray Photoelectron Spectroscopy, and in-Situ Hard X-Ray Diffraction [C] . C. Yogi, K. Kamiguchi, N. Takao, Batteries beyond lithium-ion . 2015

机译：Li-O_2电池的反应机理分析：通过软X射线吸收光谱，硬X射线光电子能谱和原位硬X射线衍射探测的电极/电解质界面结构
5. Hard and soft x-ray standing-wave photoelectron spectroscopy and angle-resolved photoemission spectroscopy study of LaNiO3/SrTiO 3 superlattice and its interfaces. [D] . Eiteneer, Daria N. 2015

机译：LaNiO3 / SrTiO 3超晶格及其界面的硬和软X射线驻波光电子能谱和角分辨光电子能谱研究。
6. Lignans in Knotwood of Norway Spruce: Localisation with Soft X-ray Microscopy and Scanning Transmission Electron Microscopy with Energy Dispersive X-ray Spectroscopy [O] . Tuomas Mansikkala, Minna Patanen, Anna Kärkönen, 2020

机译：挪威Knotwood的Lignans云杉：用软X射线显微镜的定位和扫描透射电子显微镜具有能量分散X射线光谱
7. Electronic structures of CeRu$_2X_2$ ($X$ = Si, Ge) in the paramagnetic phase studied by soft X-ray ARPES and hard X-ray photoelectron spectroscopy [O] . Yano, M., Sekiyama, A., Fujiwara, H., 2007

机译：顺磁的CeRu $ _2X_2 $（$ X $ = si，Ge）的电子结构通过软X射线aRpEs和硬X射线光电子能谱研究相

Soft x-ray reflectometry hard x-ray photoelectron spectroscopy and transmission electron microscopy investigations of the internal structure of TiO2(Ti)/SiO2/Si stacks

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