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Ge-Photodetectors for Si-Based Optoelectronic Integration

机译:用于基于Si的光电集成的Ge光电探测器

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摘要

High speed photodetectors are a key building block, which allow a large wavelength range of detection from 850 nm to telecommunication standards at optical fiber band passes of 1.3–1.55 μm. Such devices are key components in several applications such as local area networks, board to board, chip to chip and intrachip interconnects. Recent technological achievements in growth of high quality SiGe/Ge films on Si wafers have opened up the possibility of low cost Ge-based photodetectors for near infrared communication bands and high resolution spectral imaging with high quantum efficiencies. In this review article, the recent progress in the development and integration of Ge-photodetectors on Si-based photonics will be comprehensively reviewed, along with remaining technological issues to be overcome and future research trends.
机译:高速光电检测器是关键的构建模块,它允许在1.3–1.55μm的光纤带通量下从850 nm到电信标准的大波长检测范围。此类设备是局域网,板对板,芯片对芯片和芯片内互连等多种应用中的关键组件。 Si晶片上高质量SiGe / Ge薄膜生长的最新技术成就为低成本的基于Ge的近红外通信带光电探测器和具有高量子效率的高分辨率光谱成像提供了可能性。在这篇综述文章中,将对锗基光电探测器在基于硅的光子学上的开发和集成的最新进展,以及尚待克服的技术难题和未来的研究趋势进行全面回顾。

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