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首页> 美国卫生研究院文献>Sensors (Basel Switzerland) >Analytical Study of the Propagation of Fast Longitudinal Modes along wz-BN/AlN Thin Acoustic Waveguides
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Analytical Study of the Propagation of Fast Longitudinal Modes along wz-BN/AlN Thin Acoustic Waveguides

机译：wz-BN / AlN薄声波导沿纵向快速传播的解析研究

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摘要

The propagation of the fundamental symmetric Lamb mode S0 along wz-BN/AlN thin composite plates suitable for telecommunication and sensing applications is studied. The investigation of the acoustic field profile across the plate thickness revealed the presence of modes having longitudinal polarization, the Anisimkin Jr. plate modes (AMs), travelling at a phase velocity close to that of the wz-BN longitudinal bulk acoustic wave propagating in the same direction. The study of the S0 mode phase velocity and coupling coefficient (K2) dispersion curves, for different electrical boundary conditions, has shown that eight different coupling configurations are allowable that exhibit a K2 as high as about 4% and very high phase velocity (up to about 16,700 m/s). The effect of the thickness and material type of the metal floating electrode on the K2 dispersion curves has also been investigated, specifically addressing the design of an enhanced coupling device. The gravimetric sensitivity of the BN/AlN-based acoustic waveguides was then calculated for both the AMs and elliptically polarized S0 modes; the AM-based sensor velocity and attenuation shifts due to the viscosity of a surrounding liquid was theoretically predicted. The performed investigation suggests that wz-BN/AlN is a very promising substrate material suitable for developing GHz band devices with enhanced electroacoustic coupling efficiency and suitable for application in telecommunications and sensing fields.
机译：研究了适用于电信和传感应用的基本对称Lamb模式S0沿wz-BN / AlN薄复合板的传播。对整个板厚度的声场分布的研究表明，存在具有纵向极化的模态，即Anisimkin Jr.板模（AMs），其以接近wz-BN纵向体声波的相速度传播。同一方向。对不同电边界条件下的S0模式相速度和耦合系数（K 2 ）色散曲线的研究表明，允许出现K 2 的八种不同的耦合结构。 sup>高达约4％和非常高的相速度（高达约16,700 m / s）。还研究了金属浮置电极的厚度和材料类型对K 2 色散曲线的影响，特别是针对增强耦合装置的设计。然后，针对AM和椭圆偏振的S0模式，都计算了基于BN / AlN的声波导管的重力灵敏度。理论上预测了基于AM的传感器速度和由于周围液体的粘度引起的衰减位移。进行的研究表明，wz-BN / AlN是一种非常有前途的基板材料，适用于开发具有增强的电声耦合效率的GHz频段设备，并适用于电信和传感领域。

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