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首页> 美国卫生研究院文献>Sensors (Basel Switzerland) >Application of Surface Protective Coating to Enhance Environment-Withstanding Property of the MEMS 2D Wind Direction and Wind Speed Sensor
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Application of Surface Protective Coating to Enhance Environment-Withstanding Property of the MEMS 2D Wind Direction and Wind Speed Sensor

机译：应用表面保护涂层增强MEMS 2D风向和风速传感器的耐环境性能

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摘要

In this study, a microelectromechanical system (MEMS) two-dimensional (2D) wind direction and wind speed sensor consisting of a square heating source and four thermopiles was manufactured using the heat detection method. The heating source and thermopiles of the manufactured sensor must be exposed to air to detect wind speed and wind direction. Therefore, there are concerns that the sensor could be contaminated by deposition or adhesion of dust, sandy dust, snow, rain, and so forth, in the air, and that the membrane may be damaged by physical shock. Hence, there was a need to protect the heating source, thermopiles, and the membrane from environmental and physical shock. The upper protective coating to protect both the heating source and thermopiles and the lower protective coating to protect the membrane were formed by using high-molecular substances such as SU-8, Teflon and polyimide (PI). The sensor characteristics with the applied protective coatings were evaluated.
机译：在这项研究中，使用热检测方法制造了由方形加热源和四个热电堆组成的微机电系统（MEMS）二维（2D）风向和风速传感器。所制造传感器的热源和热电堆必须暴露在空气中以检测风速和风向。因此，存在空气中的灰尘，沙尘，雪，雨等的沉积或粘附会污染传感器的担心，并且膜可能会受到物理冲击的损坏。因此，需要保护热源，热电堆和膜免受环境和物理冲击。通过使用高分子物质（例如SU-8，Teflon和聚酰亚胺（PI））形成用于保护热源和热电堆的上部保护涂层和用于保护膜的下部保护涂层。评估应用了防护涂层的传感器特性。

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