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首页> 美国卫生研究院文献>Sensors (Basel Switzerland) >Exploiting Direct Laser Writing for Hydrogel Integration into Fragile Microelectromechanical Systems
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Exploiting Direct Laser Writing for Hydrogel Integration into Fragile Microelectromechanical Systems

机译：利用直接激光写入技术将水凝胶集成到脆弱的微机电系统中

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摘要

The integration of chemo-responsive hydrogels into fragile microelectromechanical systems (MEMS) with reflective surfaces in the micron to submicron range is presented. Direct laser writing (DLW) for 3D microstructuring of chemoresponsive “smart” hydrogels on sensitive microstructures is demonstrated and discussed in detail, by production of thin hydrogel layers and discs with a controllable lateral size of 2 to 5 µm and a thickness of some hundred nm. Screening results of polymerizing laser settings for precision microstructuring were determined by controlling crosslinking and limiting active chain diffusion during polymerization with macromers. Macromers are linear polymers with a tunable amount of multifunctional crosslinker moieties, giving access to a broad range of different responsive hydrogels. To demonstrate integration into fragile MEMS, the gel was deposited by DLW onto a resonator with a 200 nm thick sensing plate with high precision. To demonstrate the applicability for sensors, proof of concept measurements were performed. The polymer composition was optimized to produce thin reproducible layers and the feasibility of 3D structures with the same approach is demonstrated.
机译：提出了将化学响应水凝胶整合到具有微米至亚微米范围反射表面的易碎微机电系统（MEMS）中。通过生产薄的水凝胶层和圆盘，可控制的横向尺寸为2到5 µm，厚度为几百纳米，对用于化学反应的“智能”水凝胶在敏感的微结构上进行3D微结构化的直接激光写入（DLW）进行了详细展示和讨论。 。通过控制交联和限制大分子单体聚合过程中活性链的扩散，确定用于精密微结构化的聚合激光设置的筛选结果。大分子单体是具有可调节数量的多功能交联剂部分的线性聚合物，可以使用各种不同的响应水凝胶。为了证明集成到易碎MEMS中，将凝胶通过DLW沉积到具有200 nm厚传感板的高精度谐振器上。为了证明适用于传感器，进行了概念验证测量。优化了聚合物的组成以生产可复制的薄层，并证明了使用相同方法的3D结构的可行性。

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