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首页> 美国卫生研究院文献>Materials >Theoretical and Experimental Investigation of Surface Topography Generation in Slow Tool Servo Ultra-Precision Machining of Freeform Surfaces
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Theoretical and Experimental Investigation of Surface Topography Generation in Slow Tool Servo Ultra-Precision Machining of Freeform Surfaces

机译：自由曲面慢刀伺服超精密加工中表面形貌产生的理论和实验研究

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摘要

Freeform surfaces are featured with superior optical and physical properties and are widely adopted in advanced optical systems. Slow tool servo (STS) ultra-precision machining is an enabling manufacturing technology for fabrication of non-rotationally symmetric surfaces. This work presents a theoretical and experimental study of surface topography generation in STS machining of freeform surfaces. To achieve the nanometric surface topography, a systematic approach for tool path generation was investigated, including tool path planning, tool geometry selection, and tool radius compensation. The tool radius compensation is performed only in one direction to ensure no high frequency motion is imposed on the non-dynamic axis. The development of the surface generation simulation allows the prediction of the surface topography under various tool and machining variables. Furthermore, it provides an important means for better understanding the surface generation mechanism without the need for costly trial and error tests. Machining and measurement experiments of a sinusoidal grid and microlens array sample validated the proposed tool path generation and demonstrated the effectiveness of the STS machining process to fabricate freeform surfaces with nanometric topography. The measurement results also show a uniform topography distribution over the entire surface and agree well with the simulated results.
机译：自由曲面具有出色的光学和物理特性，并已在先进的光学系统中广泛采用。慢刀伺服（STS）超高精度加工是一种用于制造非旋转对称表面的制造技术。这项工作提出了在自由曲面的STS加工中表面形貌生成的理论和实验研究。为了获得纳米级表面形貌，研究了一种用于刀具路径生成的系统方法，包括刀具路径规划，刀具几何形状选择和刀具半径补偿。刀具半径补偿仅在一个方向上执行，以确保不会在非动态轴上施加高频运动。表面生成模拟的发展使得可以预测各种刀具和加工变量下的表面形貌。此外，它为更好地了解表面生成机理提供了重要的手段，而无需进行昂贵的试验和错误测试。正弦网格和微透镜阵列样品的机加工和测量实验验证了拟议的刀具路径生成，并证明了STS加工工艺制造具有纳米形貌的自由曲面的有效性。测量结果还显示出整个表面上的均匀地形分布，并与模拟结果很好地吻合。

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