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Numerical Simulations of Directed Self-Assembly in Diblock Copolymer Films using Zone Annealing and Pattern Templating

机译：区域退火和图案模板法在二嵌段共聚物薄膜中定向自组装的数值模拟

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Bulk fabrication of surface patterns with sub-20 nm feature sizes is immensely desirable for many existing and emerging technologies. Directed self-assembly (DSA) of block copolymers (BCPs) has been a recently demonstrated approach to achieve such feature resolution over large-scale areas with minimal defect populations. However, much work remains to understand and optimize DSA methods in order to move this field forward. This paper presents large-scale numerical simulations of zone annealing and chemo-epitaxy processing of BCP films to achieve long-range orientational order. The simulations utilize a Time-Dependent Ginzburg-Landau model and parallel processing to elucidate relationships between the magnitude and velocity of a moving thermal gradient and the resulting BCP domain orientations and defect densities. Additional simulations have been conducted to study to what degree orientational order can be further improved by combining zone annealing and chemo-epitaxy techniques. It is found that these two DSA methods do synergistically enhance long-range order with a particular relationship between thermal gradient velocity and chemical template spacing.
机译：对于许多现有技术和新兴技术，批量制造具有20μnm以下特征尺寸的表面图案非常必要。嵌段共聚物（BCP）的定向自组装（DSA）是最近被证明的方法，可以在具有最小缺陷人口的大规模区域上实现这种特征分辨率。但是，要使该领域向前发展，仍然需要大量工作来理解和优化DSA方法。本文提出了对BCP薄膜进行区域退火和化学外延处理以实现长距离取向顺序的大规模数值模拟。该仿真利用时变的Ginzburg-Landau模型和并行处理来阐明移动的热梯度的大小和速度与所产生的BCP域取向和缺陷密度之间的关系。通过结合区域退火和化学外延技术，还进行了其他模拟研究以进一步改善取向顺序的程度。发现这两种DSA方法确实以热梯度速度与化学模板间距之间的特定关系协同增强了远程顺序。

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