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Highly-efficient GaN-based light-emitting diode wafers on La0.3Sr1.7AlTaO6 substrates

机译:La0.3Sr1.7AlTaO6衬底上的高效GaN基发光二极管晶片

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摘要

Highly-efficient GaN-based light-emitting diode (LED) wafers have been grown on La0.3Sr1.7AlTaO6 (LSAT) substrates by radio-frequency molecular beam epitaxy (RF-MBE) with optimized growth conditions. The structural properties, surface morphologies, and optoelectronic properties of as-prepared GaN-based LED wafers on LSAT substrates have been characterized in detail. The characterizations have revealed that the full-width at half-maximums (FWHMs) for X-ray rocking curves of GaN(0002) and GaN(10-12) are 190.1 and 210.2 arcsec, respectively, indicating that high crystalline quality GaN films have been obtained. The scanning electron microscopy and atomic force microscopy measurements have shown the very smooth p-GaN surface with the surface root-mean-square (RMS) roughness of 1.3 nm. The measurements of low-temperature and room-temperature photoluminescence help to calculate the internal quantum efficiency of 79.0%. The as-grown GaN-based LED wafers have been made into LED chips with the size of 300 × 300 μm2 by the standard process. The forward voltage, the light output power and the external quantum efficiency for LED chips are 19.6 W, 2.78 V, and 40.2%, respectively, at a current of 20 mA. These results reveal the high optoelectronic properties of GaN-based LEDs on LSAT substrates. This work brings up a broad future application of GaN-based devices.
机译:通过具有最佳生长条件的射频分子束外延(RF-MBE),在La0.3Sr1.7AlTaO6(LSAT)衬底上生长了高效的GaN基发光二极管(LED)晶片。详细描述了在LSAT衬底上制备的GaN基LED晶片的结构特性,表面形貌和光电特性。表征表明,GaN(0002)和GaN(10-12)的X射线摇摆曲线的半峰全宽(FWHM)分别为190.1和210.2 arcsec,表明高结晶质量的GaN薄膜具有已获得。扫描电子显微镜和原子力显微镜的测量结果表明,p-GaN表面非常光滑,表面均方根(RMS)粗糙度为1.3 nm。低温和室温光致发光的测量有助于计算内部量子效率为79.0%。通过标准工艺,将已生长的GaN基LED晶片制成尺寸为300×300μm 2 的LED芯片。 LED芯片的正向电压,光输出功率和外部量子效率分别为20 powermA,19.6 areW,2.78 V和40.2%。这些结果揭示了LSAT基板上GaN基LED的高光电性能。这项工作为GaN基器件带来了广阔的未来应用。

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