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Leakage Current Non-Uniformity and Random Telegraph Signals in CMOS Image Sensor Floating Diffusions Used for In-Pixel Charge Storage

机译:泄漏电流非均匀性和随机电报信号在CMOS图像传感器浮动扩散中用于贴上像素的电荷存储器

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摘要

The leakage current non-uniformity, as well as the leakage current random and discrete fluctuations sources, are investigated in pinned photodiode CMOS image sensor floating diffusions. Different bias configurations are studied to evaluate the electric field impacts on the FD leakage current. This study points out that high magnitude electric field regions could explain the high floating diffusion leakage current non-uniformity and its fluctuation with time called random telegraph signal. Experimental results are completed with TCAD simulations allowing us to further understand the role of the electric field in the FD leakage current and to locate a high magnitude electric field region in the overlap region between the floating diffusion implantation and the transfer gate spacer.
机译:在固定光电二极管CMOS图像传感器浮动扩散中,研究了漏电流不均匀性,以及漏电流随机和离散波动源。研究了不同的偏置配置,以评估对FD漏电流的电场影响。本研究指出,高幅度电场区域可以解释高浮动扩散漏电流不均匀性,并且随着随机电报信号的时间的波动。实验结果用TCAD模拟完成,允许我们进一步了解FD漏电流中的电场的作用,并在浮动扩散植入和传输栅极间隔物之间​​定位重叠区域中的高幅度电场区域。

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