• 主题
高级搜索  >
历史搜索 清空历史
首页> 美国卫生研究院文献>Micromachines >High-Consistency Optical Fiber Fabry–Perot Pressure Sensor Based on Silicon MEMS Technology for High Temperature Environment
【2h】

High-Consistency Optical Fiber Fabry–Perot Pressure Sensor Based on Silicon MEMS Technology for High Temperature Environment

机译：基于硅MEMS技术的高温环境高一致性光纤法布里 - 珀罗压力传感器

代理获取
本网站仅为用户提供外文OA文献查询和代理获取服务，本网站没有原文。下单后我们将采用程序或人工为您竭诚获取高质量的原文，但由于OA文献来源多样且变更频繁，仍可能出现获取不到、文献不完整或与标题不符等情况，如果获取不到我们将提供退款服务。请知悉。
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

This paper proposes a high-temperature optical fiber Fabry–Perot pressure sensor based on the micro-electro-mechanical system (MEMS). The sensing structure of the sensor is composed of Pyrex glass wafer and silicon wafer manufactured by mass micromachining through anodic bonding process. The separated sensing head and the gold-plated fiber are welded together by a carbon dioxide laser to form a fiber-optic Fabry–Perot high temperature pressure sensor, which uses a four-layer bonding technology to improve the sealing performance of the Fabry–Perot cavity. The test system of high temperature pressure sensor is set up, and the experimental data obtained are calculated and analyzed. The experimental results showed that the maximum linearity of the optical fiber pressure sensor was 1% in the temperature range of 20–400 °C. The pressure sensor exhibited a high linear sensitivity of about 1.38 nm/KPa at room temperature at a range of pressures from approximarely 0-to 1 MPa. The structure of the sensor is characterized by high consistency, which makes the structure more compact and the manufacturing process more controllable.
机译：本文提出了一种基于微电机械系统（MEMS）的高温光纤法布里 - 珀罗压力传感器。传感器的传感结构由通过阳极键合工艺通过质量微机械制造的Pyrex玻璃晶片和硅晶片。分离的传感头和镀金纤维通过二氧化碳激光焊接在一起，形成光纤法布里 - 珀罗高温压力传感器，它使用四层粘合技术来改善法布里 - 珀罗的密封性能腔。建立了高温压力传感器的测试系统，并计算并分析了所获得的实验数据。实验结果表明，光纤压力传感器的最大线性度在20-400℃的温度范围内为1％。压力传感器在室温下在大约0-1MPa的压力范围内在室温下表现出约1.38nm / kPa的高线性敏感性。传感器的结构的特征在于高一致性，这使得结构更紧凑，制造过程更具可控的。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
代理获取

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号