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Improved Black Silicon for Photovoltaic Applications

机译：用于光伏应用的改良黑硅

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摘要

The morphology and the electronic properties of monocrystalline Si (c-Si) with a nano-textured "black" surface, obtained by a metal-catalyzed wet etching process, and the improvement by an additional chemical treatment are examined with regard to solar cell applications. Photoluminescence and optical reflectivity measurements show the presence of a nano-porous Si (np-Si) phase in the as-prepared nano-texture. It is found that an additional wet, chemical treatment with the standard clean 1 of the common RCA cleaning process removes the np-Si fraction and significantly alters the surface of the nano-structure. Cross-sectional scanning electron microscopy images reveal a pronounced reduction of the surface area, to values of only 3-6 times that of a planar surface. Electron spin resonance measurements were performed to investigate the type and quantity of defects induced by the nano-texturing process. The optimized nano-texture exhibits a Si dangling bond density comparable to planar c-Si wafers. Electrically detected magnetic resonance spectra reveal an additional paramagnetic defect present in the nano-textured Si, linked to a hydrogen- or oxygen-related double donor. In addition, initial results on the passivation of surface defects via atomic layer deposition of Al_2O_3 are presented. Photoconductance decay measurements of passivated samples show a tenfold increase of the effective lifetime for nano-textures which have received the additional etching treatment. The improved electronic quality of the nano-textured surface makes it an interesting candidate for application as an anti-reflection surface in solar cells.
机译：对于太阳能电池应用，研究了通过金属催化湿法刻蚀工艺获得的具有纳米纹理化“黑色”表面的单晶硅（c-Si）的形态和电子性能，以及通过附加化学处理的改进。光致发光和光反射率测量结果表明，所制备的纳米纹理中存在纳米多孔Si（np-Si）相。已发现，使用普通RCA清洁工艺的标准清洁剂1进行的其他湿法化学处理可以去除np-Si组分，并显着改变纳米结构的表面。横截面扫描电子显微镜图像显示表面积显着减少，仅为平面的3-6倍。进行电子自旋共振测量以研究由纳米纹理化过程引起的缺陷的类型和数量。优化的纳米结构展现出与平面c-Si晶圆相当的Si悬空键密度。电检测的磁共振波谱揭示了存在于纳米结构化Si中的另一个顺磁缺陷，该缺陷与氢或氧相关的双供体相连。此外，提出了通过原子层沉积Al_2O_3钝化表面缺陷的初步结果。钝化样品的光电导衰减测量结果显示，纳米纹理的有效寿命增加了十倍，纳米纹理已经接受了额外的蚀刻处理。纳米结构化表面的改进的电子质量使其成为在太阳能电池中用作抗反射表面的有趣候选。

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  • 来源
    《Advanced energy materials》 |2013年第8期|1068-1074|共7页
  • 作者

    Michael Algasinger; Julie Paye; Florian Werner; Jan Schmidt; Martin S. Brandt; Martin Stutzmann; Svetoslav Koynov;

  • 作者单位

    Walter Schottky Institut Technische Universitaet Muenchen 85748 Garching, Germany;

    Walter Schottky Institut Technische Universitaet Muenchen 85748 Garching, Germany;

    Institut fuer Solarenergieforschung Hameln 31860 Emmerthal, Germany;

    Institut fuer Solarenergieforschung Hameln 31860 Emmerthal, Germany;

    Walter Schottky Institut Technische Universitaet Muenchen 85748 Garching, Germany;

    Walter Schottky Institut Technische Universitaet Muenchen 85748 Garching, Germany;

    Walter Schottky Institut Technische Universitaet Muenchen 85748 Garching, Germany;

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