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首页> 外文期刊>Advanced Functional Materials >Room-Temperature Micropillar Growth of Lithium-Titan ate-Carbon Composite Structures by Self-Biased Direct Current Magnetron Sputtering for Lithium Ion Microbatteries
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Room-Temperature Micropillar Growth of Lithium-Titan ate-Carbon Composite Structures by Self-Biased Direct Current Magnetron Sputtering for Lithium Ion Microbatteries

机译：锂离子微电池自偏置直流磁控溅射在室温条件下微柱生长锂钛复合碳结构。

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Here, an unidentified type of micropillar growth is described at room temperature during conventional direct-current magnetron sputtering (DC-MS) deposition from a Li4Ti5O12+graphite sputter target under negative substrate bias and high operating pressure. These fabricated carbon-Li2O-TiO2 microstructures consisting of various Li4Ti5O12/Li2TiO3/LixTiO2 crystalline phases are demonstrated as an anode material in Li-ion microbatteries. The described micropillar fabrication method is a low-cost, substrate independent, single-step, room-temperature vacuum process utilizing a mature industrial complementary metal-oxide-semiconductor (CMOS)-compatible technology. Furthermore, tentative consideration is given to the effects of selected deposition parameters and the growth process, as based on extensive physical and chemical characterization. Additional studies are, however, required to understand the exact processes and interactions that form the micropillars. If this facile method is further extended to other similar metal oxide-carbon systems, it could offer alternative low-cost fabrication routes for microporous high-surface area materials in electrochemistry and microelectronics.
机译：在这里，在室温下，在负衬底偏置和高工作压力下，从Li4Ti5O12 +石墨溅射靶沉积常规直流磁控溅射（DC-MS）期间，在室温下描述的微柱生长类型尚未确定。这些由各种Li4Ti5O12 / Li2TiO3 / LixTiO2晶相组成的碳-Li2O-TiO2微观结构被证明是锂离子微电池中的负极材料。所描述的微柱制造方法是利用成熟的工业互补金属氧化物半导体（CMOS）兼容技术的低成本，独立于基板的单步室温真空工艺。此外，基于广泛的物理和化学特性，还初步考虑了所选沉积参数和生长过程的影响。但是，需要进行其他研究才能了解形成微柱的确切过程和相互作用。如果这种简便的方法进一步扩展到其他类似的金属氧化物-碳系统，它将为电化学和微电子领域的微孔高表面积材料提供替代的低成本制造途径。

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