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Sub-Thermionic Negative Capacitance Field Effect Transistors with Solution Combustion-Derived Hf_(0.5)Zr_(0.5)O_2

机译:子热离子负电容场效应晶体管,具有溶液燃烧 - 衍生的HF_(0.5)ZR_(0.5)O_2

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摘要

The fabrication of Hf0.5Zr0.5O2-ferroelectric negative capacitor using solution combustion is presented for the first time. The starting materials used for the solution combustion to form equimolar Hf0.5Zr0.5O2 are to act as both combustible elements and cation sources. Jain's method, which is used for estimating the stoichiometric quantities of precursors in propellant chemistry, has also been modified and applied. The conventional assumption for this method that molecular oxygen does not take part in the reaction is refuted and stoichiometric combustion in the presence of molecular oxygen is proposed. This reaction is followed by post-rapid thermal processing to stabilize the metastable, non-centrosymmetric orthorhombic phase. The thin film stacks, Hf0.5Zr0.5O2/HfO2, are used to achieve sub-thermionic swing (forward sweep: 25.42 +/- 8.05 mV dec(-1), reverse sweep: 42.56 +/- 4.87 mV dec(-1)) in MoS2 negative capacitance field effect transistors with a hysteresis of approximate to 40 mV at 1 nA, resulting in ultra-low-power operation.
机译:使用溶液燃烧制备HF0.5ZR0.5O2-铁电负电容器的制造。用于溶液燃烧以形成Equimolar HF0.5ZR0.5O2的起始材料是充当可燃元素和阳离子来源。用于估计推进剂化学中的化学计量的前体的化学计量量的jain的方法也已经改进和应用。对于该方法的常规假设,分子氧不参与反应中,提出了分子氧的存在下的化学计量燃烧。然后通过快速热处理进行该反应,以稳定亚稳态,非邻摩尔次晶状体相。薄膜叠层HF0.5ZR0.5O2 / HFO2用于实现亚热离子摆动(前进扫描:25.42 +/- 8.05 MV DEC(-1),反向扫描:42.56 +/- 4.87 MV DEC(-1 ))在MOS2负电容场效场效应晶体管,其滞后在1NA下近似为40mV,导致超低功率操作。

著录项

  • 来源
    《Advanced Functional Materials》 |2021年第43期|2103748.1-2103748.10|共10页
  • 作者单位

    Sungkyunkwan Univ Sch Adv Mat Sci & Engn Multifunct Nano Bio Elect Lab Suwon 16419 Gyeonggi Do South Korea;

    Sungkyunkwan Univ Sch Adv Mat Sci & Engn Multifunct Nano Bio Elect Lab Suwon 16419 Gyeonggi Do South Korea;

    Sungkyunkwan Univ Sch Adv Mat Sci & Engn Multifunct Nano Bio Elect Lab Suwon 16419 Gyeonggi Do South Korea;

    Sungkyunkwan Univ Sch Adv Mat Sci & Engn Multifunct Nano Bio Elect Lab Suwon 16419 Gyeonggi Do South Korea;

    Sungkyunkwan Univ Sch Adv Mat Sci & Engn Multifunct Nano Bio Elect Lab Suwon 16419 Gyeonggi Do South Korea;

    Sungkyunkwan Univ Sch Adv Mat Sci & Engn Multifunct Nano Bio Elect Lab Suwon 16419 Gyeonggi Do South Korea;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Jain's method; negative capacitance; solution combustion; steep slope;

    机译:jain的方法;负电容;溶液燃烧;陡坡;

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