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首页> 外文期刊>Advanced Functional Materials >High-Precision Temperature-Controllable Metal-Coated Polymeric Molds for Programmable, Hierarchical Patterning
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High-Precision Temperature-Controllable Metal-Coated Polymeric Molds for Programmable, Hierarchical Patterning

机译：高精度温度可控金属涂层聚合物模具，用于可编程，分层构图

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摘要

Nanofabrication is an indispensable process in nanoscience and nanotechnology. Unconventional lithographic techniques are often used for fabrication as alternatives to photolithography because they are faster, more cost-effective, and simpler to use. However, these techniques are limited in scalability and utility because of the collapse of preprinted structures during step-and-repeat processes. This study proposes a new class of temperaturecontrollable polymeric molds that are coated with a metal such that any site-specific patterning can be accomplished in a programmable manner using selective contact-dewetting lithography. The lithography allows sub100 nm patterning, step-and-repeat processing, and hierarchical structure fabrication. The programmable feature of the lithography can be utilized for the structural coloring and shaping of objects. Large-area programmable patterning, semiconductor device manufacturing, and the fabrication of iridescent security devices would benefit from the unique features of the proposed strategy.
机译：纳米制造是纳米科学和纳米技术中必不可少的过程。非常规光刻技术通常用于制造，作为光刻的替代方法，因为它们速度更快，更具成本效益且更易于使用。但是，由于在分步重复过程中预打印结构的崩溃，这些技术在可伸缩性和实用性方面受到限制。这项研究提出了一类新型的可控温度的聚合物模具，该模具上涂有金属，这样就可以使用选择性接触反润湿光刻技术以可编程方式完成任何特定位置的图案化。光刻允许进行低于100 nm的图案化，分步重复处理以及分层结构制造。光刻的可编程特征可用于对象的结构着色和成形。大面积可编程图案化，半导体器件制造以及虹彩安全器件的制造将受益于所提出策略的独特功能。

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  • 来源
    《Advanced Functional Materials》 |2017年第38期|1702993.1-1702993.8|共8页
  • 作者

    Kim Kwang Su; Kim Jong Uk; Lee Sori; Lee Ju Seung; Jo Young Jin; Park Byeonghak; Tak Hyowon; Yoo Pil J.; Kim Tae-Il;

  • 作者单位

    Sungkyunkwan Univ SKKU, SKKU Adv Inst Nanotechnol SAINT, Suwon 16419, South Korea;

    Sungkyunkwan Univ SKKU, Sch Chem Engn, Suwon 16419, South Korea|IBS, CNIR, Suwon 16419, South Korea;

    Sungkyunkwan Univ SKKU, Sch Chem Engn, Suwon 16419, South Korea|IBS, CNIR, Suwon 16419, South Korea;

    Sungkyunkwan Univ SKKU, Sch Chem Engn, Suwon 16419, South Korea|IBS, CNIR, Suwon 16419, South Korea;

    Sungkyunkwan Univ SKKU, Sch Chem Engn, Suwon 16419, South Korea|IBS, CNIR, Suwon 16419, South Korea;

    Sungkyunkwan Univ SKKU, Sch Chem Engn, Suwon 16419, South Korea|IBS, CNIR, Suwon 16419, South Korea;

    Sungkyunkwan Univ SKKU, Sch Chem Engn, Suwon 16419, South Korea|IBS, CNIR, Suwon 16419, South Korea;

    Sungkyunkwan Univ SKKU, SKKU Adv Inst Nanotechnol SAINT, Suwon 16419, South Korea|Sungkyunkwan Univ SKKU, Sch Chem Engn, Suwon 16419, South Korea;

    Sungkyunkwan Univ SKKU, Sch Chem Engn, Suwon 16419, South Korea|IBS, CNIR, Suwon 16419, South Korea;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    hierarchical structures; joule heating; programmable patterning; temperature-controllable molds; unconventional lithography;

    机译：分层结构;焦耳加热;可编程图案;温度可控模具;非常规光刻;

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