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首页> 外文期刊>Advanced Functional Materials >Simple Holographic Patterning for High-Aspect-Ratio Three-Dimensional Nanostructures with Large Coverage Area
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Simple Holographic Patterning for High-Aspect-Ratio Three-Dimensional Nanostructures with Large Coverage Area

机译：具有高覆盖率的高纵横比三维纳米结构的简单全息图

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摘要

Using the vertical standing wave phenomena commonly regarded as a deterrent in holographic lithography, multifaceted three-dimensional (3D) nanostructures are fabricated on polymeric photoresist materials using a simple two-beam interferometer. Large-area 3D nanostructures with high aspect ratios (greater than 10) are readily produced using this methodology, including grating, pillar and pore patterns. Furthermore, manipulation of the lithography process conditions results in unique sidewall profiles of the nanostructures. Such 3D holographic control even produces highly porous polymer membranes composed of 3D interconnected pore networks, which resembles the 3D photonic crystal compound nanostructures that were previously attainable only with limited pattern coverage area using complex multi-beam holographic lithography processes. Such well-tailored high-aspect-ratio 3D nanostructures with large pattern coverage area further enable the fabrication of novel nanostructures for functionalized materials via various additive and subtractive pattern transfer techniques such as etching, deposition, and molding. In particular, direct molding followed by thermal decomposition process leads to the synthesis of hierarchical titanium oxide nanostructures of tunable 3D geometry, which would be of great significance in applications of photonic crystals, photovoltaic solar cells, and photocatalyst in water decontamination.
机译：利用通常被视为全息光刻技术的威慑力的垂直驻波现象，使用简单的两光束干涉仪在聚合物光致抗蚀剂材料上制造了多面三维（3D）纳米结构。使用这种方法很容易生产出具有高长宽比（大于10）的大面积3D纳米结构，包括光栅，柱状图和孔图。此外，对光刻工艺条件的操纵导致纳米结构的独特侧壁轮廓。这种3D全息控制甚至可以产生由3D互连的孔网络组成的高度多孔的聚合物膜，该膜类似于3D光子晶体化合物纳米结构，以前只能使用复杂的多束全息光刻工艺以有限的图案覆盖面积才能获得。具有大的图案覆盖区域的这种量身定制的高纵横比3D纳米结构还能够通过各种加性和减性图案转移技术（例如蚀刻，沉积和模制）制造用于功能化材料的新型纳米结构。特别地，直接模制之后进行热分解过程可导致合成具有可调3D几何形状的分层氧化钛纳米结构，这对于光子晶体，光伏太阳能电池和光催化剂在水净化中的应用将具有重要意义。

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  • 来源
    《Advanced Functional Materials》 |2013年第5期|608-618|共11页
  • 作者

    Ishan Wathuthanthri; Yuyang Liu; Ke Du; Wei Xu; Chang-Hwan Choi;

  • 作者单位

    Department of Mechanical Engineering Stevens Institute of Technology Castle Point on Hudson Hoboken, NJ 07030, USA;

    Department of Mechanical Engineering Stevens Institute of Technology Castle Point on Hudson Hoboken, NJ 07030, USA;

    Department of Mechanical Engineering Stevens Institute of Technology Castle Point on Hudson Hoboken, NJ 07030, USA;

    Department of Mechanical Engineering Stevens Institute of Technology Castle Point on Hudson Hoboken, NJ 07030, USA;

    Department of Mechanical Engineering Stevens Institute of Technology Castle Point on Hudson Hoboken, NJ 07030, USA;

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