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Wear-Resistant Nanoscale Silicon Carbide Tips for Scanning Probe Applications

机译：扫描探针应用的耐磨纳米碳化硅刀头

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摘要

The search for hard materials to extend the working life of sharp tools is an age-old problem. In recent history, sharp tools must also often withstand high temperatures and harsh chemical environments. Nanotechnology extends this quest to tools such as scanning probe tips that must be sharp on the nanoscale, but still very physically robust. Unfortunately, this combination is inherently contradictory, as mechanically strong, chemically inert materials tend to be difficult to fabricate with nanoscale fidelity. Here a novel process is described, whereby the surfaces of pre-existing, nanoscale Si tips are exposed to carbon ions and then annealed, to form a strong silicon carbide (SiC) layer. The nanoscale sharpness is largely preserved and the tips exhibit a wear resistance that is orders of magnitude greater than that of conventional silicon tips and at least 100-fold higher than that of monolithic, SiO-doped diamond-like-carbon (DLC) tips. The wear is well-described by an atom-by-atom wear model, from which kinetic parameters are extracted that enable the prediction of the long-time scale reliability of the tips.
机译：寻找硬质材料以延长锋利工具的使用寿命是一个古老的问题。在最近的历史中，锋利的工具还必须经常承受高温和恶劣的化学环境。纳米技术将这一追求扩展到了诸如扫描探针尖端之类的工具，这些工具必须在纳米级上很锋利，但仍然非常坚固。不幸的是，这种组合在本质上是矛盾的，因为机械强度高，化学惰性的材料往往难以以纳米级保真度来制造。这里描述了一种新颖的工艺，通过该工艺，将预先存在的纳米级Si尖端的表面暴露于碳离子，然后退火，以形成坚固的碳化硅（SiC）层。纳米级的锐度得到了很大程度的保留，刀头的耐磨性比常规硅刀头大几个数量级，比整体式，SiO掺杂的类金刚石碳（DLC）刀头高至少100倍。磨损由一个原子到一个原子的磨损模型很好地描述，从中提取动力学参数，可以预测尖端的长期刻度可靠性。

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  • 来源
    《Advanced Functional Materials》 |2012年第8期|p.1639-1645|共7页
  • 作者

    Mark A. Lantz; Bernd Gotsmann; Papot Jaroenapibal; Tewis D. B.Jacobs; Sean D. OConnor; Kumar Sridharan; Robert W. Carpick;

  • 作者单位

    IBM Research-Zurich, Saumerstrasse 4, Riischlikon, CH8803 Switzerland;

    IBM Research-Zurich, Saumerstrasse 4, Riischlikon, CH8803 Switzerland;

    Department of Mechanical Engineering and Applied Mechanics University of Pennsylvania 220 S. 33rd St., Philadelphia, PA 19104, USA;

    Department of Materials Science and Engineering University of Pennsylvania 3231 Walnut St., Philadelphia, PA 19104, USA;

    Department of Engineering Physics University of Wisconsin 1500 Engineering Drive, Madison, Wl 53706, USA;

    Department of Engineering Physics University of Wisconsin 1500 Engineering Drive, Madison, Wl 53706, USA;

    Department of Mechanical Engineering and Applied Mechanics University of Pennsylvania 220 S. 33rd St., Philadelphia, PA 19104, USA;

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