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首页> 外文期刊>Advanced Functional Materials >Porous Silicon-Based Optical Microsensors for Volatile Organic Analytes: Effect of Surface Chemistry on Stability and Specificity
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Porous Silicon-Based Optical Microsensors for Volatile Organic Analytes: Effect of Surface Chemistry on Stability and Specificity

机译：多孔硅基光学微传感器，用于挥发性有机分析物：表面化学对稳定性和特异性的影响

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摘要

Sensing of the volatile organic compounds (VOCs) isopropyl alcohol (IPA) and heptane in air using sub-millimeter porous silicon-based sensor elements is demonstrated in the concentration range 50-800 ppm. The sensor elements are prepared as one-dimensional photonic crystals (rugate filters) by programmed electrochemical etch of p~(++) silicon, and analyte sensing is achieved by measurement of the wavelength shift of the photonic resonance. The sensors are studied as a function of surface chemistry: ozone oxidation, thermal oxidation, hydrosilylation (1-dodecene), electrochemical methylation, reaction with dicholorodimethylsilane and thermal carbonization with acetylene. The thermally oxidized and the dichlorodimethylsilane-modified materials show the greatest stability under atmospheric conditions. Optical microsensors are prepared by attachment of the porous Si layer to the distal end of optical fibers. The acetylated porous Si microsensor displays a greater response to heptane than to IPA, whereas the other chemical modifications display a greater response to IPA than to heptane. The thermal oxide sensor displays a strong response to water vapor, while the acetylated material shows a relatively weak response. The results suggest that a combination of optical fiber sensors with different surface chemistries can be used to classify VOC analytes. Application of the miniature sensors to the detection of VOC breakthrough in a full-scale activated carbon respirator cartridge simulator is demonstrated.
机译：使用亚毫米级多孔硅基传感器元件在空气中的挥发性有机化合物（VOC）异丙醇（IPA）和庚烷的浓度范围为50-800 ppm。通过对p（++）硅进行程序化的电化学蚀刻，可将传感器元件制成一维光子晶体（波纹滤光片），并通过测量光子共振的波长偏移来实现对分析物的检测。根据表面化学功能对传感器进行了研究：臭氧氧化，热氧化，氢化硅烷化（1-十二碳烯），电化学甲基化，与二氯二甲基硅烷反应以及与乙炔的热碳化。热氧化和二氯二甲基硅烷改性的材料在大气条件下显示出最大的稳定性。通过将多孔硅层附着到光纤的远端来制备光学微传感器。乙酰化的多孔硅微传感器对庚烷的响应比对IPA的响应大，而其他化学修饰对IPA的响应比对庚烷的响应大。热氧化物传感器显示出对水蒸气的强烈响应，而乙酰化材料显示出相对较弱的响应。结果表明，具有不同表面化学性质的光纤传感器的组合可用于对VOC分析物进行分类。演示了微型传感器在全尺寸活性炭呼吸器滤筒模拟器中检测VOC突破的应用。

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  • 来源
    《Advanced Functional Materials》 |2010年第17期|P.2874-2883|共10页
  • 作者

    Anne M. Ruminski; Brian H. King; Jarno Salonen; Jay L. Snyder; Michael J. Sailor;

  • 作者单位

    Department of Chemistry and Biochemistry The University of California San Diego, 9500 Gilman Drive La Jolla, CA 92093-035S (USA);

    rnDepartment of Chemistry and Biochemistry The University of California San Diego, 9500 Gilman Drive La Jolla, CA 92093-035S (USA);

    rnDepartment of Physics University of Turku FI-20014, Turku (Finland);

    rnNational Institute of Occupational Safety and HealthNIOSH/NPPTL, Pittsburgh, PA 15236 (USA);

    rnDepartment of Chemistry and Biochemistry The University of California San Diego, 9500 Gilman Drive La Jolla, CA 92093-035S (USA);

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