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首页> 外文期刊>Advanced Functional Materials >Fabrication of stable metallic patterns embedded in poly(dimethylsiloxane) and model applications in non-planar electronic and lab-on-a-chip device patterning
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Fabrication of stable metallic patterns embedded in poly(dimethylsiloxane) and model applications in non-planar electronic and lab-on-a-chip device patterning

机译：嵌入聚二甲基硅氧烷中的稳定金属图案的制造及其在非平面电子和芯片实验室设备图案化中的模型应用

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This article describes the fabrication of durable metallic patterns that are embedded in poly(dimethylsiloxane) (PDMS) and demonstrates their use in several representative applications. The method involves the transfer and subsequent embedding of micrometer-scale gold (and other thin-film material) patterns into PDMS via adhesion chemistries mediated by silane coupling agents. We demonstrate the process as a suitable method for patterning stable functional metallization structures on PDMS, ones with limiting feature sizes less than 5 mu m, and their subsequent utilization as structures suitable for use in applications ranging from soft-lithographic patterning, non-planar electronics, and microfluidic (lab-on-a-chip, LOC) analytical systems. We demonstrate specifically that metal patterns embedded in both planar and spherically curved PDMS substrates can be used as compliant contact photomasks for conventional photolithographic processes. The non-planar photomask fabricated with this technique has the same surface shape as the substrate, and thus facilitates the registration of structures in multilevel devices. This quality was specifically tested in a model demonstration in which an array of one hundred metal oxide semiconductor field-effect transistor (MOSFET) devices was fabricated on a spherically curved Si single-crystalline lens. The most significant opportunities for the processes reported here, however, appear to reside in applications in analytical chemistry that exploit devices fabricated using the methods of soft lithography. Toward this end, we demonstrate durably bonded metal patterns on PDMS that are appropriate for use in microfluidic, microanalytical, and microelectromechanical systems. We describe a multilayer metal-electrode fabrication scheme (multilaminate metal-insulator-metal (MIM) structures that substantially enhance performance and stability) and use it to enable the construction of PDMS LOC devices using electrochemical detection. A polymer-based microelectrochemical analytical system, one incorporating an electrode array for cyclic voltammetry and a microfluidic system for the electrophoretic separation of dopamine and catechol with amperometric detection, is demonstrated.
机译：本文介绍了嵌入在聚（二甲基硅氧烷）（PDMS）中的耐用金属图案的制造，并演示了它们在几种代表性应用中的用途。该方法涉及通过硅烷偶联剂介导的粘附化学将微米级金（和其他薄膜材料）图案转移并随后嵌入到PDMS中。我们证明了该工艺是在PDMS上对稳定的功能性金属化结构进行构图的一种合适方法，其极限特征尺寸小于5微米，并且随后将其用作适用于软光刻构图，非平面电子学等应用的结构，以及微流体（芯片实验室，LOC）分析系统。我们专门证明，嵌入在平面和球形弯曲的PDMS基板中的金属图案可用作常规光刻工艺的顺应性接触光掩模。用该技术制造的非平面光掩模具有与基板相同的表面形状，因此有助于在多级器件中对准结构。在模型演示中专门测试了这种质量，在模型演示中，在球面弯曲的Si单晶透镜上制造了一百个金属氧化物半导体场效应晶体管（MOSFET）器件的阵列。然而，这里报道的方法的最大机会似乎在于分析化学中的应用，这些应用利用了使用软光刻方法制造的器件。为此，我们在PDMS上演示了持久结合的金属图案，适用于微流体，微分析和微机电系统。我们描述了一种多层金属电极制造方案（实质上提高性能和稳定性的多层金属-绝缘体-金属（MIM）结构），并使用它来利用电化学检测来构建PDMS LOC器件。展示了一种基于聚合物的微电化学分析系统，该系统结合了用于循环伏安法的电极阵列和用于通过安培检测对多巴胺和邻苯二酚进行电泳分离的微流体系统。

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