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首页> 外文期刊>Advanced Optical Materials >Ultracompact Camera Pixel with Integrated Plasmonic Color Filters
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Ultracompact Camera Pixel with Integrated Plasmonic Color Filters

机译：集成等离子彩色滤光片的超紧凑型相机像素

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摘要

Photodetector size imposes a fundamental limit on the amount of information that can be recorded by an image sensor. Compact, high-resolution sensors are generally preferred for portable electronic devices such as mobile phones and digital cameras, and as a result, a significant effort has been invested in improving the image quality provided by small-area image sensors. Reducing photodetector size, however, still faces challenges in implementation requiring improvements in current technology to meet the demand for ultracompact imaging systems such as cameras. An issue with a decrease in size is associated with photodetectors utilizing color filters. In most commonly used camera designs these filters are made of dyes or pigments and incompatible with the complementary metal-oxide-semiconductor fabrication process. They are, therefore, fabricated in two different technological processes and require subsequent alignment. As the pixel size decreases, the alignment of these layers becomes challenging. Furthermore, dye-based filters need to have a thickness of the order of micrometers to ensure sufficient absorption. Here a compact, low-cost color sensor is proposed and experimentally demonstrated utilizing monolithically integrated plasmonic antennas that have a nanoscale thickness and are fabricated in the same technological process with photodetector matrix.
机译：光电探测器的尺寸对图像传感器可以记录的信息量施加了基本限制。紧凑，高分辨率的传感器通常是便携式电子设备（如移动电话和数码相机）的首选，因此，在改善小面积图像传感器提供的图像质量方面投入了大量精力。然而，减小光电检测器的尺寸在实施中仍然面临挑战，需要对当前技术进行改进以满足对诸如照相机的超小型成像系统的需求。尺寸减小的问题与利用滤色器的光电检测器有关。在最常用的相机设计中，这些滤镜由染料或颜料制成，并且与互补的金属氧化物半导体制造工艺不兼容。因此，它们是用两种不同的工艺过程制造的，需要随后进行对准。随着像素尺寸的减小，这些层的对准变得具有挑战性。此外，基于染料的过滤器需要具有微米级的厚度以确保足够的吸收。在这里，提出了一种紧凑，低成本的彩色传感器，并利用单片集成等离子天线进行了实验证明，该等离子天线具有纳米级的厚度，并以与光电探测器矩阵相同的工艺过程制造。

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