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首页> 外文期刊>Applied Computational Electromagnetics Society journal >Application of the Wheeler Incremental Inductance Rule for Robust Design and Modeling of MMIC Spiral Inductors
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Application of the Wheeler Incremental Inductance Rule for Robust Design and Modeling of MMIC Spiral Inductors

机译：惠勒增量电感法则在MMIC螺旋电感器稳健设计和建模中的应用

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摘要

A physics based model using Wheelers incremental inductance rule for calculating the change in inductance due to variations in line width and thickness for planar circular spiral inductors is given. It is shown that the series resistance of an MMIC inductor can be used as a figure of merit for the robustness of the inductor against etching variations in line width during fabrication. Circular inductors are shown to have less inductance variation than rectangular inductors. This model can be evaluated quickly using a circuit simulator without the need for expensive EM analysis. In the electromagnetic modeling of MMIC inductors, a fine grid and several sheets are used to accurately model the current distribution and determine the resistance. Sonnet™ is used to accurately model the 3D characteristics of thick conductors such as loss and effects of physically thick metal. A procedure based on the Richardson extrapolation method is used to extract the resistance values without long computation time. Applications include calculating the change in inductance due to over-or under-etching of metal lines during fabrication. For 2 to 4 turn inductors with variations in line width of +/-20% of the nominal width, the average variation in modeled inductance is within 8% of the EM simulated variation.
机译：给出了一种基于物理学的模型，该模型使用Wheelers增量电感法则来计算平面圆形螺旋电感器由于线宽和线宽变化而引起的电感变化。示出了，MMIC电感器的串联电阻可以用作品质因数，以用于电感器在制造期间抵抗蚀刻的线宽变化的鲁棒性。圆形电感器的电感变化比矩形电感器小。使用电路模拟器可以快速评估该模型，而无需进行昂贵的EM分析。在MMIC电感器的电磁建模中，使用细网格和几张薄片来精确建模电流分布并确定电阻。 Sonnet™用于精确建模厚导体的3D特性，例如物理上厚金属的损耗和影响。使用基于Richardson外推法的过程来提取电阻值，而无需花费很长的计算时间。应用包括计算由于制造过程中金属线蚀刻过度或蚀刻不足引起的电感变化。对于线宽变化为标称宽度的+/- 20％的2至4匝电感器，建模电感的平均变化在EM模拟变化的8％之内。

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