Electrostatic fringes effect in systems with three charged parallel micro-beams

Pezhman A. Hassanpour; Patricia M. Nieva; Amir Khajepour

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Electrostatic fringes effect in systems with three charged parallel micro-beams

机译：具有三个带电平行微束的系统中的静电条纹效应

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This paper presents the geometric analysis of the electric field edge effect in three charged rectangular conductors. This effect is taken into account for evaluating the electric capacitance and the force between charged bodies. The comprehensive model presented in this work includes seven geometric parameters to fully define the system and calculate a correction factor to the analytical model. The correction factor is presented as closed-form equations. Instead of using finite element models, these equations can be used for determining the gradient of capacitance and the electrostatic force between charged bodies.

机译：本文介绍了三种带电矩形导体中电场边缘效应的几何分析。在评估电容和带电体之间的力时会考虑到这种影响。这项工作中提出的综合模型包括七个几何参数，以完全定义系统并计算分析模型的校正因子。校正因子以闭式方程式表示。代替使用有限元模型，这些方程式可用于确定电容梯度和带电体之间的静电力。

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来源
《Applied Mathematical Modelling》 |2013年第4期|1932-1947|共16页
作者
Pezhman A. Hassanpour; Patricia M. Nieva; Amir Khajepour;
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作者单位

Department of Mechanical and Mechatronics Engineering, University of Waterloo, Waterloo, Ontario, Canada N2L 3G;

Department of Mechanical and Mechatronics Engineering, University of Waterloo, Waterloo, Ontario, Canada N2L 3G;

Department of Mechanical and Mechatronics Engineering, University of Waterloo, Waterloo, Ontario, Canada N2L 3G;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种 eng
中图分类
关键词
Fringes; Edge effect; Micro-beam; Electrostatic force; Microelectromechanical systems; MEMS;

机译：边缘;边缘效果;微束;静电力;微机电系统;微机电系统;

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Electrostatic fringes effect in systems with three charged parallel micro-beams

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