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Frequency shift prediction of a shear mode multi-layered FBAR sensor in viscous media using transfer matrix method

机译：使用传输矩阵法在粘性介质中剪切模式多层FBAR传感器的频移预测

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摘要

In this paper, new frequency equations of a shear mode c-axis tilted FBAR (Film Bulk Acoustic Wave Resonator) sensor operating in viscous liquid media are derived by using the transfer matrix method to predict the frequency shift (FS) induced by fluid viscosity. Top and bottom electrodes of FBAR are considered as a superposition of a pure elastic model and a perfectly conducting model. Employing the perturbation method and developed frequency equations, an approximate FS expression is obtained to study the effects of viscous liquid properties on frequency shifts for the sensor operating in water-glycerol solutions. Numerical results by the developed frequency equations are compared with the published experimental results and those predicted by the traditional Stockbridge-Kanazawa equation, which was originally derived for quartz crystal microbalances (QCMs). Meanwhile, the influence of the electrode material and thickness on FS is also discussed to demonstrate the outperformance of the developed equations over the Stockbridge-Kanazawa equation. Results show that the analytical equations for frequency shift analysis have more potential than the well-known Stockbridge-Kanazawa equation to predict frequency shift characteristics of FBAR sensors in terms of accuracy and efficiency.
机译：在本文中，通过使用传递矩阵方法来推导在粘性液体介质中操作的剪切模式C轴倾斜的FBAR（薄膜体声波谐振器）传感器的新频率方程，以预测通过流体粘度引起的频移（FS）。 FBAR的顶部和底部电极被认为是纯弹性模型的叠加和完美的导电模型。采用扰动方法和发育频率方程，获得近似的FS表达，以研究粘性液体特性对水 - 甘油溶液中操作的传感器的频移的影响。将发育频率方程的数值结果与公布的实验结果和传统的StockBridg-Kanazawa方程预测的数值进行比较，这些结果最初导出用于石英晶体微稳定（QCMS）。同时，还讨论了电极材料和厚度对FS上的影响，以证明开发方程在StockBridge-Kanazawa方程上的表现。结果表明，频移分析的分析方程具有比众所周知的储备 - 卡达泽方程更潜力，以预测精度和效率方面的FBAR传感器的频移特性。

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  • 来源
    《Applied Mathematical Modelling》 |2021年第11期|555-565|共11页
  • 作者

    Zinan Zhao; Zhenghua Qian; Yook-Kong Yong;

  • 作者单位

    State Key Laboratory of Mechanics and Control of Mechanical Structures College of Aerospace Engineering Nanjing University of Aeronautics and Astronautics Nanjing 210016 China Department of Civil and Environmental Engineering Rutgers University NJ 08854 USA;

    State Key Laboratory of Mechanics and Control of Mechanical Structures College of Aerospace Engineering Nanjing University of Aeronautics and Astronautics Nanjing 210016 China;

    Department of Civil and Environmental Engineering Rutgers University NJ 08854 USA;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Frequency equation; Shear mode; Frequency shift; Electrode effect; C-axis tilted multi-layered FBAR; Viscous media;

    机译：频率方程;剪切模式;频移;电极效果;C轴倾斜多层FBAR;粘性媒体;

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