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Analysis of a two-dimensional photonic bandgap structure fabricated by an interferometric lithographic system

机译：干涉光刻系统制造的二维光子带隙结构分析

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摘要

An interferometric lithographic technique and double exposure method are applied to theoretically and experimentally investigate several kinds of 2D periodic structures. The shape, lattice symmetries, and lattice constants of the 2D structures, for different substrate rotational angles, are obtained from the simulated predictions. The shape of the 2D structures can be varied by controlling the rotational angle of the substrate and the development process, and they are validated experimentally. The variation of the lattice symmetry of the 2D structure with the substrate rotational angle is discussed in detail in relation to the axial angle and lattice constant. It is found that square, circular, rectangular, and elliptical scatterers which are arranged in parallelogram, triangular, and square lattices (with different lattice constants) can be obtained. The photonic bandgaps for each condition are also investigated. When the substrate rotational angles are the same, the normalized frequency (ωa/2πc) of photonic bandgap structures with an equal filling factor are very similar regardless of the interference angle. The results are helpful in designing the forbidden frequency when the lattice constant and the scatterer shape can be controlled by the interferometric lithographic technique.
机译：在理论上和实验上，采用干涉光刻技术和二次曝光方法研究了几种2D周期性结构。从模拟预测中获得了不同衬底旋转角度的2D结构的形状，晶格对称性和晶格常数。二维结构的形状可以通过控制基板的旋转角度和显影过程来改变，并且已通过实验验证。相对于轴向角和晶格常数，详细讨论了二维结构的晶格对称性随基板旋转角的变化。发现可以得到以平行四边形，三角形和正方形格子（具有不同的格子常数）布置的正方形，圆形，矩形和椭圆形散射体。还研究了每种条件下的光子带隙。当基板旋转角相同时，无论干涉角如何，具有相同填充因子的光子带隙结构的归一化频率（ωa/2πc）都非常相似。当可以通过干涉光刻技术控制晶格常数和散射体形状时，该结果有助于设计禁忌频率。

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