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首页> 外文期刊>Applied Physics Letters >Suppression of metastable-phase inclusion in N-polar (0001) InGaN/GaN multiple quantum wells grown by metalorganic vapor phase epitaxy
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Suppression of metastable-phase inclusion in N-polar (0001) InGaN/GaN multiple quantum wells grown by metalorganic vapor phase epitaxy

机译:通过金属有机气相外延生长抑制N极性(0001)InGaN / GaN多量子阱中的亚稳态相包含

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摘要

The metastable zincblende (ZB) phase in N-polar (0001) (-c-plane) InGaN/GaN multiple quantum wells (MQWs) grown by metalorganic vapor phase epitaxy is elucidated by the electron backscatter diffraction measurements. From the comparison between the -c-plane and Ga-polar (0001) (+c-plane), the -c-plane MQWs were found to be suffered from the severe ZB-phase inclusion, while ZB-inclusion is negligible in the +c-plane MQWs grown under the same growth conditions. The ZB-phase inclusion is a hurdle for fabricating the -c-plane light-emitting diodes because the islands with a triangular shape appeared on a surface in the ZB-phase domains. To improve the purity of stable wurtzite (WZ)-phase, the optimum conditions were investigated. The ZB-phase is dramatically eliminated with decreasing the Ⅴ/Ⅲ ratio and increasing the growth temperature. To obtain much-higher-quality MQWs, the thinner InGaN wells and the hydrogen introduction during GaN barriers growth were tried. Consequently, MQWs with almost pure WZ phase and with atomi-cally smooth surface have been demonstrated.
机译:通过电子背散射衍射测量阐明了通过金属有机气相外延生长的N极性(0001)(-c平面)InGaN / GaN多量子阱(MQW)中的亚稳态闪锌矿(ZB)相。通过-c平面和Ga极性(0001)(+ c平面)的比较,发现-c平面MQW受严重的ZB相夹杂,而ZB夹杂可忽略不计。在相同的生长条件下生长的+ c平面MQW。 ZB相夹杂物是制造-c面发光二极管的障碍,因为具有三角形形状的岛出现在ZB相域的表面上。为了提高稳定纤锌矿(WZ)相的纯度,研究了最佳条件。随着Ⅴ/Ⅲ比的降低和生长温度的升高,ZB相被显着消除。为了获得更高质量的MQW,尝试了更薄的InGaN阱以及在GaN势垒生长过程中引入氢。因此,已经证明了具有几乎纯的WZ相和原子表面光滑的MQW。

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  • 来源
    《Applied Physics Letters》 |2015年第22期|222102.1-222102.4|共4页
  • 作者单位

    Institute for Materials Research, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi, Japan;

    Institute for Materials Research, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi, Japan,CREST, Japan Science and Technology Agency, 4-1-8 Honcho, Kawaguchi, Saitama, Japan;

    Institute for Materials Research, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi, Japan;

    Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, Aichi, Japan;

    Institute for Materials Research, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi, Japan,CREST, Japan Science and Technology Agency, 4-1-8 Honcho, Kawaguchi, Saitama, Japan;

    Institute for Materials Research, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi, Japan;

    Institute for Materials Research, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi, Japan,CREST, Japan Science and Technology Agency, 4-1-8 Honcho, Kawaguchi, Saitama, Japan;

    Institute for Materials Research, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi, Japan,CREST, Japan Science and Technology Agency, 4-1-8 Honcho, Kawaguchi, Saitama, Japan;

    Institute for Materials Research, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi, Japan,CREST, Japan Science and Technology Agency, 4-1-8 Honcho, Kawaguchi, Saitama, Japan;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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