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Continuous ultra-thin MoS_2 films grown by low-temperature physical vapor deposition

机译:低温物理气相沉积法制备连续超薄MoS_2薄膜

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摘要

Uniform growth of pristine two dimensional (2D) materials over large areas at lower temperatures without sacrifice of their unique physical properties is a critical pre-requisite for seamless integration of next-generation van der Waals heterostructures into functional devices. This Letter describes a vapor phase growth technique for precisely controlled synthesis of continuous, uniform molecular layers of MoS_2 on silicon dioxide and highly oriented pyrolitic graphite substrates of over several square centimeters at 350 ℃. Synthesis of few-layer MoS_2 in this ultra-high vacuum physical vapor deposition process yields materials with key optical and electronic properties identical to exfoliated layers. The films are composed of nano-scale domains with strong chemical binding between domain boundaries, allowing lift-off from the substrate and electronic transport measurements from contacts with separation on the order of centimeters.
机译:原始二维(2D)材料在较低温度下在大面积上均匀生长而又不牺牲其独特的物理性能,是下一代范德华异质结构无缝集成到功能器件中的关键前提。这封信描述了一种气相生长技术,用于在350℃下在二氧化硅和高度取向的热解石墨衬底上精确控制合成连续,均匀的MoS_2分子层,并形成高度定向的热解石墨衬底。在这种超高真空物理气相沉积工艺中合成几层MoS_2会产生具有与剥离层相同的关键光学和电子特性的材料。薄膜由纳米级畴组成,畴边界之间具有牢固的化学键合,可以从基材上剥离下来,并可以测量接触距离为几厘米的电子传输。

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  • 来源
    《Applied Physics Letters》 |2014年第26期|261604.1-261604.5|共5页
  • 作者单位

    Department of Chemical and Materials Engineering, University of Dayton, Dayton, Ohio 45469, USA,Materials and Manufacturing Directorate, Air Force Research Laboratory, Wright-Patterson AFB, Ohio 45433, USA;

    Materials and Manufacturing Directorate, Air Force Research Laboratory, Wright-Patterson AFB, Ohio 45433, USA,University of Dayton Research Institute, Dayton, Ohio 45469, USA;

    Department of Mechanical and Nuclear Engineering, Pennsylvania State University, College Park, Pennsylvania 16802, USA;

    Department of Mechanical and Nuclear Engineering, Pennsylvania State University, College Park, Pennsylvania 16802, USA;

    Materials and Manufacturing Directorate, Air Force Research Laboratory, Wright-Patterson AFB, Ohio 45433, USA,University of Dayton Research Institute, Dayton, Ohio 45469, USA;

    Materials and Manufacturing Directorate, Air Force Research Laboratory, Wright-Patterson AFB, Ohio 45433, USA,University of Dayton Research Institute, Dayton, Ohio 45469, USA;

    Materials and Manufacturing Directorate, Air Force Research Laboratory, Wright-Patterson AFB, Ohio 45433, USA;

    Materials and Manufacturing Directorate, Air Force Research Laboratory, Wright-Patterson AFB, Ohio 45433, USA;

    Materials and Manufacturing Directorate, Air Force Research Laboratory, Wright-Patterson AFB, Ohio 45433, USA;

    Materials and Manufacturing Directorate, Air Force Research Laboratory, Wright-Patterson AFB, Ohio 45433, USA;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
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