Dielectric nonlinear characteristics of Ba(Zr_(0.35)Ti_(0.65))O_(3) thin films grown by a sol-gel process

Jiwei Zhai; Xi Yao; Liangying Zhang; Bo Shen

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Dielectric nonlinear characteristics of Ba(Zr_(0.35)Ti_(0.65))O_(3) thin films grown by a sol-gel process

机译：溶胶-凝胶法生长Ba（Zr_（0.35）Ti_（0.65））O_（3）薄膜的介电非线性特性

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Ba(Zr_(0.35)Ti_(0.65))O_(3) (BZT) thin films were deposited via a sol-gel process on Pt-coated silicon substrates. The BZT films were in the perovskite phase and had polycrystalline structure. Temperature-dependent dielectric measurements revealed that the thin films have relaxor behavior and diffuse phase transition characteristics. The tunability K of the dielectric constant (at 600 kV/cm) is about 40% in the temperature range of 179-293 K. The improved temperature stability from this BZT thin film is beneficial to applications requiring a wide range of operating temperatures, thereby eliminating the need for environmental controls. Although the K value is not extraordinarily large compared to (Ba,Sr)TiO_(3), the low dielectric constant of BZT is attractive for microwave frequency applications. This provides an additional possibility in balancing K and dielectric constant through materials engineering for optimum device performance.

机译：Ba（Zr_（0.35）Ti_（0.65））O_（3）（BZT）薄膜通过溶胶-凝胶工艺沉积在涂有Pt的硅基板上。 BZT膜处于钙钛矿相并具有多晶结构。与温度有关的电介质测量表明，薄膜具有弛豫特性和扩散相变特性。在179-293 K的温度范围内，介电常数的可调性K（在600 kV / cm时）约为40％。这种BZT薄膜改善的温度稳定性有利于需要宽工作温度范围的应用，因此消除了环境控制的需要。尽管与（Ba，Sr）TiO_（3）相比K值不是特别大，但是BZT的低介电常数对微波频率应用很有吸引力。通过材料工程，这为平衡K和介电常数提供了另一种可能性，以实现最佳的器件性能。

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来源
《Applied Physics Letters》 |2004年第16期|p.3136-3138|共3页
作者
Jiwei Zhai; Xi Yao; Liangying Zhang; Bo Shen;
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作者单位

Functional Materials Research Laboratory, Tongji University, Shanghai 200092, China;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种 eng
中图分类应用物理学;
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机译：溶胶 - 凝胶的可调谐介电性质（PB_（0.35），SR_（0.65））（Zr_（0.5），Ti_（0.5））O_3微波应用的薄膜
2. Thick Epitaxial Pb(Zr_(0.35),Ti_(0.65))O_ Films Grown on (100)CaF_2 Substrates with Polar-Axis-Orientation [J] . Takashi Fujisawa, Hiroshi Nakaki, Rikyu Ikariyama, Applied physics express . 2008,第8期

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4. Phase Transition and Dielectric Tunability of Chemical Solution Deposited (Pb_(0.35)Sr_(0.65))(Zr_(0.5)Ti_(0.5))O_3 Thin Films on Pt/ZrO_2/SiO_2/Si Substrates [C] . Naba K Karan, Marilin Perez, Jose Saavedra, MRS fall meeting . 2008

机译：在Pt / ZrO_2 / SiO_2 / Si衬底上沉积（Pb_（0.35）Sr_（0.65））（Zr_（0.5）Ti_（0.5））O_3薄膜的化学溶液的相变和介电可调谐性
5. Sol-gel synthesis of fluoride glasses and thin films: The effects of processing on the chemical, physical, optical, and rare earth fluorescence properties of sol-gel ZBLA glasses. [D] . Dejneka, Matthew J. 1995

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6. Ultra Uniform Pb0.865La0.09(Zr0.65Ti0.35)O3 Thin Films with Tunable Optical Properties Fabricated via Pulsed Laser Deposition [O] . Shenglin Jiang, Chi Huang, Honggang Gu, 2018

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机译：srTiO（sub 3）（100）上的外延pb（Zr（sub x）Ti（sub 1（minus）x））O（sub 3）/ srRuO（sub 3）（x = 0,0.35,0.65）多层薄膜通过mOCVD和RF溅射制备mgO（100）和mgO（100）

Dielectric nonlinear characteristics of Ba(Zr_(0.35)Ti_(0.65))O_(3) thin films grown by a sol-gel process

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