Characteristics of low-resistivity aluminum-doped zinc oxide films deposited at room temperature by off-axis radio-frequency sputtering on flexible plastic substrates

著录项

• 来源
  《Applied Physics》 |2016年第8期|731.1-731.11|共11页
• 作者

  Li-Min Wang; Chih-Yi Wang; Ciao-Ren Jheng; Syu-Jhan Wu; Chen-Kai Sai; Ya-Ju Lee; Ching-Yu Chiang; Bor-Yuan Shew;

  展开▼
• 作者单位

  Department of Physics/Graduate Institute of Applied Physics, National Taiwan University, Taipei 10617, Taiwan;

  Department of Physics/Graduate Institute of Applied Physics, National Taiwan University, Taipei 10617, Taiwan;

  Institute of Electro-Optical Science and Technology, National Taiwan Normal University, Taipei 11677, Taiwan;

  Institute of Electro-Optical Science and Technology, National Taiwan Normal University, Taipei 11677, Taiwan;

  Institute of Electro-Optical Science and Technology, National Taiwan Normal University, Taipei 11677, Taiwan;

  Institute of Electro-Optical Science and Technology, National Taiwan Normal University, Taipei 11677, Taiwan;

  National Synchrotron Radiation Research Center, Hsinchu 30076, Taiwan;

  National Synchrotron Radiation Research Center, Hsinchu 30076, Taiwan;

  展开▼
• 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词