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首页> 外文期刊>Applied Physics A: Materials Science & Processing >Morphological and structural modifications induced in a-Si_(1-x)C_x:H films by excimer laser annealing
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Morphological and structural modifications induced in a-Si_(1-x)C_x:H films by excimer laser annealing

机译:准分子激光退火在a-Si_(1-x)C_x:H薄膜中引起的形貌和结构修饰

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摘要

Hydrogenated amorphous silicon carbon films of different carbon content deposited by plasma enhanced chemical vapour deposition on Corning glass and crystalline silicon substrates have been irradiated by an excimer (KrF) laser. The properties of these samples were investigated by X-ray diffraction, field emission scanning electron microscopy and Fourier transform infrared spectroscopy before and after laser treatment, in order to understand the rolernof the carbon content as well as the substrate in the structural modifications. It has been demonstrated that the changes induced in the films by the laser treatment are independent of the substrate but depend on the carbon content which facilitates the crystallization process.
机译:已经通过准分子(KrF)激光辐照了通过等离子体增强化学气相沉积法在康宁玻璃和晶体硅基板上沉积的碳含量不同的氢化非晶硅碳膜。在激光处理之前和之后,通过X射线衍射,场发射扫描电子显微镜和傅里叶变换红外光谱对这些样品的性能进行了研究,以了解碳含量以及基质在结构修饰中的作用。已经证明,通过激光处理在膜中引起的变化与衬底无关,但是取决于促进结晶过程的碳含量。

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  • 来源
    《Applied Physics A: Materials Science & Processing》 |2010年第4期|P.1163-1168|共6页
  • 作者单位

    CNISM Unita' di Napoli, Complesso Universitario MSA, via Cintia, 80126 Napoli, Italy Dipartimento di Scienze Fisiche, Universita di Napoli 'Federico IF, Complesso Universitario MSA, via Cintia, 80126 Napoli, Italy;

    rnDipartimento di Scienze Fisiche, Universita di Napoli 'Federico IF, Complesso Universitario MSA, via Cintia, 80126 Napoli, Italy CNR-SPIN, Complesso Universitario MSA, via Cintia, 80126 Napoli, Italy;

    rnDepartment of Physics, Utkal University, Bhubaneswar 751004, India;

    rnDipartimento di Scienza dei Materiali ed Ingegneria Chimica, Politecnico di Torino, Turin Duca degli Abruzzi 24, 10129 Turin, Italy;

    rnIIT@POLITO-Center for Space Human Robotics, corso Trento 21, 10129 Turin, Italy;

    rnDipartimento di Fisica, Universita' di Camerino, via Madonna delle Carceri 9, 62032 Camerino, Italy;

    rnDipartimento di Fisica, Universita' di Camerino, via Madonna delle Carceri 9, 62032 Camerino, Italy;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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