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首页> 外文期刊>Applied Physics. A, Materials Science & Processing >Pyroelectric Mg-modified PbTiO_3 thin films and devices for thermal infrared detection
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Pyroelectric Mg-modified PbTiO_3 thin films and devices for thermal infrared detection

机译:热电镁修饰的PbTiO_3薄膜及热红外检测装置

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摘要

High-performance pyroelectric infrared (IR) detectors have been fabricated using magnesium-doped lead titanate (Pb_(1-x)Mg_xTiO_3 (PMT), with x = 0 ~ 0.08) thin films deposited on Pt/SiO_2/Si substrates by diol-based sol-gel processing. The randomly oriented PMT thin film exhibits a relatively small dielectric constant and a large pyroelectric coefficient. The pyroelectric characteristics of detectors with various magnesium contents, as a function of modulation frequency, were conducted. It was found that PMT(6) has a large voltage respon-sivity of 5280 (V/W) at 20 Hz, and a specific detectivity (D~*) of 5.12 x 10~7 cm Hz~(1/2)/W at 100 Hz. These results indicate that the PMT thin film with x = 0.06 was most suitable for application as high-performance pyroelectric thin-film detectors.
机译:高性能热释电红外(IR)探测器是使用二醇掺杂钛酸铅(Pb_(1-x)Mg_xTiO_3(PMT),x = 0〜0.08)薄膜沉积在Pt / SiO_2 / Si衬底上制成的。溶胶-凝胶加工。无规取向的PMT薄膜表现出相对较小的介电常数和较大的热电系数。进行了镁含量不同的探测器的热电特性随调制频率的变化。结果发现,PMT(6)在20 Hz时具有5280(V / W)的大电压响应度,比检测度(D〜*)为5.12 x 10〜7 cm Hz〜(1/2)/ W在100 Hz这些结果表明,x = 0.06的PMT薄膜最适合用作高性能热释电薄膜检测器。

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