Fabrication of nanorod InGaN/GaN multiple quantum wells with self-assembled Ni nano-island masks

著录项

• 来源
  《Applied Surface Science》 |2013年第ptab期|772-777|共6页
• 作者

  Guofeng Yang; Ying Guo; Huaxin Zhu; Dawei Yan; Guohua Li; Shumei Gao; Kexiu Dong;

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• 作者单位

  School of Science, Jiangnan University, No. 1800, Lihu Road, Wuxi 214122, China;

  School of Science, Jiangnan University, Wuxi 214122, China;

  School of Science, Jiangnan University, Wuxi 214122, China;

  Department of Electronic Engineering, Jiangnan University, Wuxi 214122, China;

  School of Science, Jiangnan University, Wuxi 214122, China;

  School of Science, Jiangnan University, Wuxi 214122, China;

  School of Mechanical and Electronic Engineering, Chuzhou University, Chuzhou 239000, China;

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• 收录信息
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词

  Ni nano-island; Rapid thermal annealing; Inductively coupled-plasma etching; Nanorod; InGaN/GaN MQWs;

  机译：镍纳米岛快速热退火;电感耦合等离子体蚀刻;纳米棒;InGaN / GaN MQW;