Synthesis of free standing carbon nanosheet using electron cyclotron resonance plasma enhanced chemical vapor deposition

Rajesh Thomas; G. Mohan Rao

首页> 外文期刊>Applied Surface Science >Synthesis of free standing carbon nanosheet using electron cyclotron resonance plasma enhanced chemical vapor deposition

【24h】

Synthesis of free standing carbon nanosheet using electron cyclotron resonance plasma enhanced chemical vapor deposition

机译：电子回旋共振等离子体增强化学气相沉积法合成游离碳纳米片

获取原文

获取原文并翻译 | 示例

掌桥外文数据库（机构版） >>

开具论文收录证明 >>

文献代查 >>

页面导航

摘要
著录项
相似文献
相关主题

摘要

Carbon nanosheets (CNSs) have been synthesized by electron cyclotron resonance (ECR) plasma enhanced chemical vapor deposition (PECVD) using a mixture of acetylene and argon gases on copper foil as the substrate. Micrometer-wide carbon sheets consisting of several atomic layers thick graphene sheets have been synthesized by controlled decomposition of carbon radicals in ECR-PECVD. Raman spectroscopy of these films revealed characteristics of a disordered graphitic sheet. Thick folded carbon-sheets and a semi transparent freestanding CNSs have been observed by scanning electron microscopy. This is a promising technique to synthesize free standing CNSs and can be used in the fabrication of nanoelecronic devices in future.

机译：碳纳米片（CNS）是通过电子回旋共振（ECR）等离子体增强化学气相沉积（PECVD）合成的，其中乙炔和氩气的混合物在铜箔上作为基底。通过在ECR-PECVD中控制碳自由基的分解，已经合成了由数个原子层厚的石墨烯片组成的微米级碳片。这些薄膜的拉曼光谱显示出无序石墨片的特征。通过扫描电子显微镜观察到厚折叠的碳片和半透明的独立式中枢神经系统。这是合成独立式CNS的有前途的技术，将来可用于制造纳米电子器件。

著录项

来源
《Applied Surface Science》 |2012年第11期|p.4877-4880|共4页
作者
Rajesh Thomas; G. Mohan Rao;
展开▼
作者单位

Plasma Processing Laboratory, Department of Instrumentation and Applied Physics, Indian Institute of Science, Bangalore 560012, India;

Plasma Processing Laboratory, Department of Instrumentation and Applied Physics, Indian Institute of Science, Bangalore 560012, India;

展开▼
收录信息
原文格式 PDF
正文语种 eng
中图分类
关键词
carbon nanosheet; microwave-ECR plasma deposition; electron microscopy; infrared spectroscopy; photoelectron spectroscopy;

机译：碳纳米片微波-ECR等离子体沉积;电子显微镜;红外光谱光电子能谱;

相似文献

外文文献
中文文献
专利

1. Plasma etch resistance of polymeric carbon thin films prepared by electron cyclotron resonance plasma-enhanced chemical vapor deposition [J] . Xiaohua Chen, Laren M. Tolbert, Z. Y. Ning, Polymer Preprints . 1999,第2期

机译：电子回旋共振等离子体增强化学气相沉积法制备的聚合物碳薄膜的耐等离子体刻蚀性能
2. Synthesis of 3-dimensional porous graphene nanosheets using electron cyclotron resonance plasma enhanced chemical vapour deposition [J] . Thomas Rajesh, Rao G. Mohan RSC Advances . 2015,第103期

机译：电子回旋共振等离子体增强化学气相沉积法合成三维多孔石墨烯纳米片
3. Effect of hydrogen flow on the properties of hydrogenated amorphous carbon films fabricated by electron cyclotron resonance plasma enhanced chemical vapor deposition [J] . Deng X.R., Leng Y.X., Dong X., Surface & Coatings Technology . 2011,第5期

机译：氢流对电子回旋共振等离子体增强化学气相沉积法制备的氢化非晶碳膜性能的影响
4. Synthesis of free-standing carbon nanotube electrodes using plasma-enhanced chemical vapor deposition [C] . Won Seok Chang IEEE International Conference on Plasma Sciences . 2016

机译：利用等离子体增强化学气相沉积法合成自立式碳纳米管电极
5. Nanocrystalline and amorphous silicon thin film transistors deposited by microwave plasma electron cyclotron resonance chemical vapor deposition: Material analysis, device fabrication and characterization. [D] . Teng, Lihong. 2003

机译：微波等离子体电子回旋共振化学气相沉积法沉积的纳米晶和非晶硅薄膜晶体管：材料分析，器件制造和表征。
6. Metal/Carbon Hybrid Nanostructures Produced from Plasma-Enhanced Chemical Vapor Deposition over Nafion-Supported Electrochemically Deposited Cobalt Nanoparticles [O] . Mohammad Islam, Amine Achour, Khalid Saeed, 2018

机译：在Nafion负载的电化学沉积钴纳米粒子上进行等离子体增强化学气相沉积产生的金属/碳杂化纳米结构
7. Effect of bias voltage on the properties of hydrogenated amorphous carbon films fabricated on CoCrMo alloy by electron cyclotron resonance plasma enhance chemical vapor deposition (ECR-PECVD) [O] . Deng Xingrui, Leng Y.X., H.Sun, 2011

机译：偏压对电子回旋共振等离子体在CoCrMo合金上制备的氢化非晶碳膜性能的影响增强了化学气相沉积（ECR-PECVD）
8. Nitrogen Plasma Instabilities and the Growth of Silicon Nitride by Electron Cyclotron Resonance Microwave Plasma Chemical Vapor Deposition [R] . Pool, F. S. 1996

机译：电子回旋共振微波等离子体化学气相沉积法研究氮等离子体不稳定性及氮化硅的生长

Synthesis of free standing carbon nanosheet using electron cyclotron resonance plasma enhanced chemical vapor deposition

摘要

著录项

相似文献

相关主题

期刊订阅