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首页> 外文期刊>Applied Surface Science >Chemical states and optical properties of thermally evaporated Ge-Te and Ge-Sb-Te amorphous thin films
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Chemical states and optical properties of thermally evaporated Ge-Te and Ge-Sb-Te amorphous thin films

机译：热蒸发的Ge-Te和Ge-Sb-Te非晶薄膜的化学态和光学性质

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摘要

Thin amorphous films of Ge_(22)Sb_(22)Te_(56) and Ge_(50)Te_(50) have been prepared from their respective poly-crystalline bulk on glass substrates by thermal evaporation technique. The amorphous nature of the films was checked with X-ray diffraction studies. Amorphous-to-crystalline transition of the films has been induced by thermal annealing and the structural phases have been identified by X-ray diffraction. The phase transformation temperature of the films was evaluated by temperature dependent sheet resistance measurement. The chemical structure of the amorphous films has been investigated using X-ray photoelectron spectroscopy and the role of Sb in phase change Ge_(22)Sb_(22)Te_(56) film is discussed. Survey and core level (Ge 3d, Te 3d, Te 4d, Sb 3p, Sb 3d, O 1s, C 1s) band spectra has been recorded and analyzed. For optical studies, the transmittance and the reflectance spectra were measured over the wavelength ranges 400-2500 nm using UV-vis-NIR spectroscopy. The optical band gap, refractive index and extinction coefficient are also presented for thermally evaporated amorphous thin films.
机译：Ge_（22）Sb_（22）Te_（56）和Ge_（50）Te_（50）的非晶薄膜已通过热蒸发技术在玻璃基板上由它们各自的多晶块制成。用X射线衍射研究检查了膜的无定形性质。通过热退火诱导了膜的非晶-晶体转变，并且通过X射线衍射鉴定了结构相。膜的相变温度通过与温度相关的薄层电阻测量来评估。利用X射线光电子能谱研究了非晶态薄膜的化学结构，探讨了Sb在相变Ge_（22）Sb_（22）Te_（56）薄膜中的作用。记录并分析了调查和核心能级（Ge 3d，Te 3d，Te 4d，Sb 3p，Sb 3d，O 1s，C 1s）的能谱。对于光学研究，使用UV-vis-NIR光谱仪在400-2500 nm的波长范围内测量透射率和反射光谱。还给出了热蒸发的非晶薄膜的光学带隙，折射率和消光系数。

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  • 来源
    《Applied Surface Science》 |2012年第19期|p.7406-7411|共6页
  • 作者

    S. Kumar; D. Singh; S. Shandhu; R. Thangaraj;

  • 作者单位

    Semiconductor Laboratory, Department of Physics, Guru Nanak Dev University Amritsar, India;

    Semiconductor Laboratory, Department of Physics, Guru Nanak Dev University Amritsar, India;

    Semiconductor Laboratory, Department of Physics, Guru Nanak Dev University Amritsar, India;

    Semiconductor Laboratory, Department of Physics, Guru Nanak Dev University Amritsar, India;

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  • 正文语种 eng
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  • 关键词

    chalcogenide; amorphous semiconductors; chemical state; XPS;

    机译：硫属化物非晶半导体;化学状态XPS;

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