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Dependence of aluminum-doped zinc oxide work function on surface cleaning method as studied by ultraviolet and X-ray photoelectron spectroscopies

机译:紫外和X射线光电子能谱研究铝掺杂氧化锌功函数对表面清洁方法的依赖性

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摘要

The dependence of aluminum-doped zinc oxide (AZO) work function on surface treatment, i.e. acetone solvent cleaning and ultraviolet (UV)-ozone cleaning, was studied by ultraviolet photoelectron spectroscopy and X-ray photoelectron spectroscopy. Comparing different cleaning methods, UV-ozone treated AZO achieved relative higher work function of 4.26 eV; whereas acetone solvent treated AZO had relative lower work function of 3.94 eV. Two factors, stoichiometry ratio of [O_(znal)]/|Zn] +1.5[A1] and carbon contamination on AZO surface, affected the work function and, moreover, the stoichiometry ratio was supposed to be the controlling factor. It was concluded that AZO with high stoichiometry ratio and reduced carbon concentration possessed high work function.
机译:通过紫外光电子能谱和X射线光电子能谱研究了掺杂铝的氧化锌(AZO)功函数对表面处理的依赖性,即丙酮溶剂清洗和紫外线(UV)臭氧清洗。比较不同的清洁方法,紫外线臭氧处理过的偶氮获得了相对较高的4.26 eV功函。丙酮溶剂处理过的AZO的相对功函数较低,为3.94 eV。 [O_(znal)] / | Zn] +1.5 [A1]的化学计量比和AZO表面的碳污染这两个因素影响了功函数,而且,化学计量比是控制因素。结论是化学计量比高,碳浓度降低的AZO具有较高的功函。

著录项

  • 来源
    《Applied Surface Science》 |2011年第9期|p.3884-3887|共4页
  • 作者单位

    Division of Functional Materials and Nanodevices, Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, People's Republic of China;

    Division of Functional Materials and Nanodevices, Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, People's Republic of China;

    Division of Functional Materials and Nanodevices, Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, People's Republic of China;

    Division of Functional Materials and Nanodevices, Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, People's Republic of China;

    Division of Functional Materials and Nanodevices, Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, People's Republic of China;

    Division of Functional Materials and Nanodevices, Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, People's Republic of China;

    Faculty of Information Science and Engineering, Ningbo University, Ningbo 315211, People's Republic of China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Al-doped zinc oxide,Work function,UV-ozone treatment,Ultraviolet photoelectron spectroscopy;

    机译:铝掺杂氧化锌功函紫外臭氧处理紫外光电子能谱;

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