Compaction of poly(dimethylsiloxane) (PDMS) due to proton beam irradiation

著录项

• 来源
  《Applied Surface Science》 |2011年第10期|p.4612-4615|共4页
• 作者

  Szabolcs Zoltan Szilasi; Janos Kokavecz; Robert Huszank; Istvan Rajta;

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• 作者单位

  Institute of Nuclear Research of the Hungarian Academy of Sciences, H-4001 Debrecen, P.O. Box 51, Hungary;

  Department of Optics and Quantum Electronics, University of Szeged, Dóm ter 9, H-6720 Szeged, Hungary;

  Institute of Nuclear Research of the Hungarian Academy of Sciences, H-4001 Debrecen, P.O. Box 51, Hungary;

  Institute of Nuclear Research of the Hungarian Academy of Sciences, H-4001 Debrecen, P.O. Box 51, Hungary;

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• 收录信息
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词

  Poly(dimethylsiloxane) (PDMS); Compaction; Topography; Irradiation; Proton Beam Writing (PBW);

  机译：聚二甲基硅氧烷（PDMS）;压实;地形;辐照质子束书写（PBW）;